Akira Muraoka

US Patent:

61421642, Nov 7, 2000

Filed:

Mar 9, 1998

Appl. No.:

9/037390

Inventors:

Bruce C. Wier - San Jose CA
Akira Muraoka - Menlo Park CA
Charles K. Lokey - Palo Alto CA

Assignee:

Ultra Clean Technology Systems & Service, Inc. - Menlo Park CA

International Classification:

B08B 502
B08B 504
B08B 9035

US Classification:

137 1504

Abstract:

One aspect of the present invention provides an apparatus which permits the efficient purging of leaked process gas at the component-panel interface in an integrated gas panel system. The apparatus provides conduit structure for directing a flow of purging gas through a surface interface whereat a gas-manifold panel meets gas-manifold components. A further aspect of the invention provides a method for efficiently purging process gas which might leak out at the component-panel interface in an integrated gas panel system. The method includes the step of simultaneously directing a stream of purging gas along a pathway extending over the surface interface and along a pathway which intersects and passes through the surface interface.