Andrew Guzman

US Patent:

7224504, May 29, 2007

Filed:

Jul 30, 2003

Appl. No.:

10/629798

Inventors:

Pradeep K Govil - Norwalk CT, US
Andrew Guzman - Danbury CT, US

Assignee:

ASML Holding N. V.

International Classification:

G02B 26/08

US Classification:

359224, 359223, 310311

Abstract:

A deformable optical device includes a reflection device having a first reflecting surface and a second surface, an actuator (e. g. , an integrated circuit piezoelectric actuator) having a support device and moveable extensions extending therefrom, which are coupled to the second surface, and electrodes coupled to corresponding ones of the extensions. Wavefront aberrations are detected and used to generate a control signal. The extensions are moved based on the control signal. The movement deforms the reflecting surface to correct the aberrations in the wavefront.

US Patent:

7372614, May 13, 2008

Filed:

Oct 6, 2005

Appl. No.:

11/244006

Inventors:

Pradeep K. Govil - Norwalk CT, US
Andrew Guzman - Danbury CT, US

Assignee:

ASML Holding N.V. - Veldhoven

International Classification:

G02B 26/00
G02B 5/08

US Classification:

359290, 359846, 359849, 359900

Abstract:

A deformable optical device includes a reflection device having a first reflecting surface and a second surface, an actuator (e. g. , an integrated circuit piezoelectric actuator) having a support device and moveable extensions extending therefrom, which are coupled to the second surface, and electrodes coupled to corresponding ones of the extensions. Wavefront aberrations are detected and used to generate a control signal. The extensions are moved based on the control signal. The movement deforms the reflecting surface to correct the aberrations in the wavefront.

US Patent:

6398373, Jun 4, 2002

Filed:

Aug 9, 2000

Appl. No.:

09/635984

Inventors:

Andrew J. Guzman - Danbury CT
Carlo La Fiandra - Wilton CT
Ronald P. Sidor - Stratford CT
Jorge S. Ivaldi - Trumbull CT
Michael L. Nelson - West Redding CT

Assignee:

ASML US, Inc. - Wilton CT

International Classification:

G02B 508

US Classification:

359846, 359849, 359900

Abstract:

A system for adjusting a deformable mirror including a reaction plate, a plurality of pneumatic actuators coupled to the reaction plate, and a plurality of push-pull flexures coupled on a first end to the pneumatic actuators, and coupled on a second end to the non-reflective side the deformable mirror, the plurality of push-pull flexures being disposed at various locations on the back of the deformable mirror. The respective pairs of push-pull flexures and pneumatic actuators are operated to support and alter the shape of the deformable mirror to allow for correction of a plurality of optical aberrations.

Author:

Andrew T. Guzman

ISBN #:

0195305566