Avron M Zwilling

US Patent:

6781694, Aug 24, 2004

Filed:

Sep 13, 2002

Appl. No.:

10/242351

Inventors:

Michael Nahum - Kirkland WA
Benjamin K. Jones - Seattle WA
Patrick A. Renalds - Bothell WA
Avron M. Zwilling - Redmond WA
Kim W. Atherton - Kirkland WA

Assignee:

Mitutoyo Corporation - Kawasaki

International Classification:

G01N 2125

US Classification:

356420, 356421, 382312, 235494

Abstract:

An absolute 2D position-sensing device is usable to measure the relative position of two elements. A 2D absolute scale includes an integrated 2D absolute scale pattern extending over the 2D scale area along each measuring axis of the scale. The integrated 2D absolute scale pattern includes a plurality of periodic portions interleaved with a plurality of non-periodic portions along each axis. Each periodic portion includes a plurality of periodically-placed scale elements. Each non-periodic portion includes a plurality of code elements indicative of an absolute measurement value. The code elements may have a length that is narrower along each measuring axis is than the length of the periodic scale elements along each measuring axis. The offset of the periodically-placed elements relative to a readhead of the device is combined with the absolute measurement value to determine an absolute position.

US Patent:

7211782, May 1, 2007

Filed:

Jul 29, 2004

Appl. No.:

10/901701

Inventors:

Joseph D. Tobiason - Woodinville WA, US
Avron Zwilling - Redmond WA, US
Casey Emtman - Sammamish WA, US
Scott Harsila - Seattle WA, US
Mike Goldsworthy - Seattle WA, US
Kim W. Atherton - Kirkland WA, US

Assignee:

Mitutoyo Corporation - Kawasaki-shi

International Classification:

G01J 1/04
G02B 6/36

US Classification:

25022711, 25023113, 385 53

Abstract:

All-optical output precision measuring gauges that sense the displacement of an internal scale grating are disclosed. Each type of gauge includes a compact, miniature, or ultra-miniature optical readhead that includes a light source for transmitting light to the scale grating, and optical-fiber detector channels for receiving light from the scale grating and outputting optical measuring signals from the gauge. In various embodiments, the optical-fiber detector channels have respective phase grating masks for receiving a periodic light pattern that moves in correspondence to the scale grating, and the channels are arranged in balanced pairs. In various embodiments, the optical readhead is an interferometric-type optical readhead that provides a measuring resolution as fine as 10–50 nanometers or less. In various embodiments, the gauge is provided in an unprecedented miniature size. In various embodiments, the gauge is motorized to provide a precision actuator.

US Patent:

7965393, Jun 21, 2011

Filed:

Nov 20, 2008

Appl. No.:

12/275170

Inventors:

Avron Zwilling - Redmond WA, US
Joseph Daniel Tobiason - Woodinville WA, US
Scott Harsila - Bothell WA, US
Karl Gustav Masreliez - Banyuls-sur-mer, FR

Assignee:

Mitutoyo Corporation - Kawasaki-shi

International Classification:

G01B 11/02

US Classification:

356499

Abstract:

A reference mark configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels is provided. The readhead includes primary fibers that provide reference mark primary signals processed to generate a reference signal with accuracy of approximately 0. 2 microns. The readhead may include secondary fibers used to generate reference mark secondary signals processed to generate a reference signal with accuracy of approximately 20 nanometers. Spatial filter masks configured for the secondary fiber optic receiver channels provide two spatially periodic secondary signals arising from interference fringes outside of the receiving area of the primary fiber optic receiver channels. The secondary signals are out of phase with one another and their spatial frequency is higher than that of the primary signals. A signal crossing of the reference mark secondary signals is identified that is spatially adjacent to a signal crossing of the reference mark primary reference signals.

US Patent:

20090027692, Jan 29, 2009

Filed:

Jul 24, 2007

Appl. No.:

11/782608

Inventors:

Avron Zwilling - Redmond WA, US
Joseph Daniel Tobiason - Woodinville WA, US
Scott Harsila - Bothell WA, US
Karl Gustav Masreliez - Banyuls-sur-mer, FR

Assignee:

MITUTOYO CORPORATION - Kawasaki-shi

International Classification:

G01B 11/14

US Classification:

356617

Abstract:

A fiber optic readhead and scale arrangement for measuring displacement provides a reference position indication. The scale includes a scale track comprising a first type of track portion providing first level of zero order reflectance, such as a grating, and a reference mark providing a second level of zero order reflectance, such as a mirror. The reference mark is configured with certain length or boundary spacing dimensions determined based on certain fiber optic receiver channel aperture dimensions in the readhead.In some configurations a fiber optic readhead and track that provides the reference position indication is separate from a fiber optic readhead and track that provides periodic incremental measurement signals. In some configurations an integrated fiber optic readhead and an integrated track structure provide both the reference position indication and the periodic incremental measurement signals.

US Patent:

6664535, Dec 16, 2003

Filed:

Jul 16, 2002

Appl. No.:

10/195422

Inventors:

Michael Nahum - Kirkland WA
Benjamin K. Jones - Seattle WA
Avron M. Zwilling - Redmond WA

Assignee:

Mitutoyo Corporation - Kawasaki

International Classification:

G01D 534

US Classification:

25023114, 250566, 356617

Abstract:

An absolute position-sensing device is usable to measure the relative position of two elements. An absolute scale includes an integrated track extending along a measuring axis of the scale. The integrated track includes a plurality of periodic portions interleaved with a plurality of non-periodic portions. Each periodic portion includes a plurality of periodically-placed scale elements. Each non-periodic portion includes a plurality of code elements indicative of an absolute measurement value. The code elements may have a length that is narrower along the measuring axis than the length of the periodic scale elements. The offset of the periodic-placed elements relative to a readhead of the device is combined with the absolute measurement value to determine an absolute position.