Scott G. Singlevich - Colorado Springs CO Bradley S. Holway - Colorado Springs CO Kurt D. Humphrey - Colorado Springs CO Brian Scott Poarch - Colorado Springs CO Michael R. Reeder - Colorado Springs CO Neal J. Verzwyvelt - Colorado Springs CO
Assignee:
United Technologies Corporation - Windsor Locks CT
International Classification:
H01L 2182
US Classification:
438131
Abstract:
An antifuse includes a metal cap layer located at the second barrier layer of the antifuse to improve the antifuse yield and long term reliability. An antifuse further includes one or more interfacial oxide film layers surrounding an antifuse dielectric layer to provide narrowing of the antifuse programming voltage distribution and to further improve the antifuse yield and long term reliability.
Antifuse Structure And Process For Manufacturing The Same
Kurt D. Humphrey - Colorado Springs CO Bradley S. Holway - Colorado Springs CO Craig Hafer - Colorado Springs CO
Assignee:
United Technologies Corporation - Hartford CT
International Classification:
H01L 2170 H01L 2700
US Classification:
438600
Abstract:
An antifuse may include one or more interfacial oxide film layers surrounding an antifuse dielectric layer to provide narrowing of the antifuse programming voltage distribution and to improve the antifuse yield and long term reliability.