Branko Bem - Newark CA, US Dikran Babikian - Millbrae CA, US
Assignee:
ASML Holding N.V.
International Classification:
B05C 5/02
US Classification:
118313, 118319, 118321, 118323, 118 52, 222386
Abstract:
Methods and apparatus for controllably dispensing photoresist solutions and other fluids in semiconductor manufacturing equipment from an array of syringe-based fluid dispensers. A multi-syringe fluid dispensing system is provided for photoresist coating within a wafer track coating module. The coating module may contain a spin chuck that is positioned within a catch cup. A robotic dispense arm and gripper assembly may be positioned within the coating module for gripping and positioning a fluid syringe. An array of syringes may be stored on a solution tray within the wafer track coating module for holding a plurality of fluid syringes containing photoresist solutions.
Detachable Cell-Delivery System For Patch-Clamp Unit
Yuri Osipchuk - Foster City CA, US Yuriy Roll - Foster City CA, US Alan S. Finkel - E. Malvern, AU Alexander A. Dromaretsky - Davis CA, US Branko Bem - Newark CA, US
The cell-delivery unit of a high-throughput electrophysiological testing system is implemented as a reusable movable unit suitable for repetitive delivery of cells to a disposable, multi-aperture patch-clamp tray. An electric field emanating from the patch aperture is used to align the dispenser with the aperture. A set of electrodes in the nozzle of the dispenser is used to detect the electric field and effect the alignment. According to another aspect of the invention, dielectrophoretic fields produced by sets of electrodes in the nozzle form a retaining cage that is used first to suspend a test cell directly above the patch aperture and then to urge the cell toward it. A movable cell sorter may also be coupled to the cell-delivery unit.
Rod Duncan - Grass Valley CA, US Joel Witt - Dallas TX, US Mark Quadling - Plano TX, US Henley Quadling - Dallas TX, US Jeffrey Prince - Grass Valley CA, US Branko Bem - Plano TX, US Rui Xu - Plano TX, US Kirk Ray - Plano TX, US Basil Haymann - Dallas TX, US Anthony Starfield - St Paul MN, US
The improved milling machine makes use of individually controlled x-axis, y-axis, and z-axis carriages. These carriages provide positive and precise control of the position of the cutting tools and the blank to be cut. A tool changer allows the tools to be changed to accommodate other materials. A camera is used to detect wear on the tools.
Methods And Apparatus For Dispensing Semiconductor Processing Solutions With Multi-Syringe Fluid Delivery Systems
Methods and apparatus for controllably dispensing photoresist solutions and other fluids in semiconductor manufacturing equipment from an array of syringe-based fluid dispensers. A multi-syringe fluid dispensing system is provided for photoresist coating within a wafer track coating module. The coating module may contain a spin chuck that is positioned within a catch cup. A robotic dispense arm and gripper assembly may be positioned within the coating module for gripping and positioning a fluid syringe. An array of syringes may be stored on a solution tray within the wafer track coating module for holding a plurality of fluid syringes containing photoresist solutions.
A mill blank mandrel may rigidly secure machinable material for a machining process. The mandrel may be freely and easily inserted in a corresponding mandrel socket and secured without the use of a tool. The mandrel may be detected and verified when inserted in the mandrel socket.
Apparatus For Automatically Opening And Closing, Locking And Unlocking Bathroom Stall Door
An apparatus and system for automatically opening and closing a bathroom stall door. The system includes a motor for driving the door open or closed. A control unit controls the operation of the motor. An outer activation sensor senses a presence of a person in proximity to the outer activation sensor. Upon sensing a presence of a person in proximity to the outer activation sensor by the outer activation sensor, the control unit commands the motor to open the door and automatically close the door after a predetermined time period. When an inner activation sensor senses a presence in the proximity to the inner activation sensor, the control unit locks the door lock. When the inner activation sensor senses a presence in proximity to the inner activation sensor a second time, the control unit unlocks the door lock and commands the motor to open the door.
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