John Choy - Westminster CO, US Donald E. Lee - Fort Collins CO, US Kevin J. Grannen - Thornton CO, US Hongjun Feng - Windsor CO, US Carrie A. Rogers - Fort Collins CO, US Urupattur C. Sridharan - San Jose CA, US
Assignee:
Avago Technologies General IP (Singapore) Pte. Ltd. - Singapore
International Classification:
H03H 9/15 H03H 9/205 H01L 41/083
US Classification:
333187, 333189
Abstract:
The temperature-compensated film bulk acoustic resonator (FBAR) device comprises an FBAR stack that comprises an FBAR characterized by a resonant frequency having a temperature coefficient and a temperature-compensating layer comprising doped silicon dioxide. The FBAR comprises opposed planar electrodes and a piezoelectric element between the electrodes. The piezoelectric element has a temperature coefficient on which the temperature coefficient of the resonant frequency of the FBAR depends at least in part.
Temperature Compensation Of Film Bulk Acoustic Resonator Devices
Kevin Grannen - Thornton CO, US John Choy - Westminster CO, US Carrie Rogers - Fort Collins CO, US
International Classification:
H03H 9/15
US Classification:
310320000, 310346000
Abstract:
A resonator. The resonator includes a bottom electrode overlaying at least part of a substrate, a composite structure overlaying at least part of the bottom electrode, and a top electrode overlaying at least part of the composite structure. The composite structure comprises a piezoelectric layer and a compensation layer, and the compensation layer includes silicon dioxide combined with boron.
Piezoelectric Resonator Structures Having Temperature Compensation
Kevin J. Grannen - Thomton CO, US Carrie A. Rogers - Fort Collins CO, US John Choy - Westminster CO, US
Assignee:
Avago Technologies Wireless IP (Singapore) Pte. Ltd. - Singapore
International Classification:
H01L 41/04 H01L 41/22
US Classification:
310346, 29 2535
Abstract:
An electrical resonator comprises a substrate comprising a cavity. The electrical resonator comprises a resonator stack suspended over the cavity. The resonator stack comprises a first electrode; a second electrode; a piezoelectric layer; and a temperature compensating layer comprising borosilicate glass (BSG).
- Singapore, SG Carrie A. Rogers - Fort Collins CO, US John Choy - Westminster CO, US
International Classification:
H03H 9/02 H01L 41/18
Abstract:
An acoustic resonator comprises a substrate comprising a cavity. The electrical resonator comprises a resonator stack suspended over the cavity. The resonator stack comprises a first electrode; a second electrode; a piezoelectric layer; and a temperature compensating layer comprising borosilicate glass (BSG).
Name / Title
Company / Classification
Phones & Addresses
Carrie C Rogers
Robert R. Rogers Farms, LLC PURCHASE,ACQUIRE,OWN,HOLD LAND & FRAMING REAL/PERSONAL PROPERTY
Carrie Rogers
CARRIE ROGERS STUDIO, INC
Carrie Rogers
K-9 KITCHEN LLC
Carrie A. Rogers Nurse
Christus St Joseph Outpatient Center Medical Doctor's Office
Washington Elementary School Walla Walla WA 1975-1978, Green Park Elementary School Walla Walla WA 1979-1982, Pioneer Middle School Walla Walla WA 1982-1985
Oakbrook Elementary School Tacoma WA 1972-1979, Hudtloff Junior High School Tacoma WA 1979-1982, A.G. Hudtloff Middle School Tacoma WA 1979-1982, A-I High School Lakewood (pierce Co.) WA 1983-1984
Community:
Krista Clark, Diane Anderson, Ronnie Mckinney, Mychele Cooper