Christopher S Margeson

US Patent:

7296777, Nov 20, 2007

Filed:

Mar 24, 2004

Appl. No.:

10/807291

Inventors:

Christopher S. Margeson - Sunnyvale CA, US

Assignee:

Nikon Corporation - Tokyo

International Classification:

F16M 13/00

US Classification:

248550, 248500, 248680

Abstract:

Forces are minimized in an object supported relative to a surface by providing a first, preferably static force sufficient to retain the object is position when at rest, preferably through a clamping arrangement having a first actuator, measuring or predicting an acceleration and applying a second, preferably dynamic force corresponding to the acceleration. The first and second forces are preferably arranged to be additive or reinforcing but the arrangement can be made fail-safe at the expense of increased power consumption by arranging the first force in accordance with the maximum anticipated acceleration and counteracting the first force with the second force for lesser or zero accelerations. The second force is preferably provided by a clamp of arbitrary configuration which can be moved into and out of engagement with the object. By minimizing forces applied to the object in such a manner, damage such as creep and propagation of crystal lattice dislocations over time can largely be prevented.

US Patent:

7692768, Apr 6, 2010

Filed:

Jun 29, 2006

Appl. No.:

11/427439

Inventors:

Michael B. Binnard - Belmont CA, US
Douglas C. Watson - Campbell CA, US
Christopher S. Margeson - Mountain View CA, US

Assignee:

Nikon Corporation - Tokyo

International Classification:

G03B 27/54
G03B 27/42
G03B 27/62

US Classification:

355 67, 355 53, 355 75

Abstract:

Methods and apparatus for shielding a reticle within an illumination system are disclosed. According to one aspect of the present invention, a blind arrangement for shielding an object such as a reticle includes a coil assembly which has at least one coil, an air supply that supplies air, and a first blind portion. The first blind portion includes at least one magnet and is not in physical contact with the coil. The first blind portion is supported at a distance from the coil by the air, and the coil assembly cooperates with the magnet to cause the first blind portion to move. The first blind portion shields the object when the first blind portion is in a first position.

US Patent:

8416386, Apr 9, 2013

Filed:

Mar 12, 2008

Appl. No.:

12/047244

Inventors:

Christopher S. Margeson - Mountain View CA, US
Douglas C. Watson - Campbell CA, US

Assignee:

Nikon Corporation - Tokyo

International Classification:

G03B 27/42
G03B 27/52
G03B 27/54
G02B 7/02

US Classification:

355 53, 355 55, 355 67, 359818, 359819

Abstract:

Clamps are disclosed for holding an optical element relative to a support. An exemplary clamp includes first and second arms and a member connecting the arms such that a portion of a mounting feature of the optical element is between the first and second arms. The first arm applies a clamping force toward a respective portion of the mounting feature, and the second arm includes a seat. The seat has at least upper and intermediate portions. The upper portion engages the respective location on the mounting feature. The intermediate portion is situated between the upper portion and the second arm and has a lateral thickness less than the lateral thickness of the upper portion. The intermediate portion exhibits elastic and plastic deformability sufficient for any moment applied by the clamp to the mounting feature to be limited to less than a designated peak moment, while maintaining substantially full engagement of the upper portion with the respective location.

US Patent:

8441615, May 14, 2013

Filed:

Aug 27, 2009

Appl. No.:

12/548895

Inventors:

Fardad A. Hashemi - Moraga CA, US
Douglas C. Watson - Campbell CA, US
Christopher Margeson - Mountain View CA, US

Assignee:

Nikon Corporation - Tokyo

International Classification:

G03B 27/58
G03B 27/62
F16M 13/00

US Classification:

355 72, 355 75, 248562

Abstract:

A precision assembly () for fabricating a substrate () includes a precision fabrication apparatus (), a pedestal assembly () and a suspension system (). The precision fabrication apparatus () fabricates the substrate (). The pedestal assembly () supports at least a portion of the fabrication apparatus (). The suspension system () inhibits the transfer of motion between the mounting base () and the pedestal assembly (). The suspension system () can include (i) a first boom () that is coupled to the mounting base () and the pedestal assembly (), the first boom () being pivotable coupled to at least one of the mounting base () and the pedestal assembly (), and (ii) a first resilient assembly () that is coupled between the mounting base () and at least one of the first boom () and the pedestal assembly (). The first resilient assembly () can function similar to a zero length spring over an operational range of the resilient assembly (). With this design, the components of the precision fabrication apparatus () are better protected by the suspension system () during a seismic disturbance.

US Patent:

20040008433, Jan 15, 2004

Filed:

May 29, 2003

Appl. No.:

10/448633

Inventors:

Christopher Margeson - Sunnyvale CA, US

Assignee:

Nikon Corporation - Tokyo

International Classification:

G02B007/182

US Classification:

359/871000

Abstract:

A wavefront aberration correction system for an adaptive optic such as a deformable mirror uses many correction units, each having a force-applying member attached to the back surface of the adaptive optic at a specified position and an actuator connected to it through a force-communicating device. The actuators are disposed outside the perimeter of the adaptive optic. The force-communicating device may include a lever or a bell-crank supported rotatably around a pivot such as a flexural pivot and redirects the force of the actuator.

US Patent:

20060077579, Apr 13, 2006

Filed:

Oct 12, 2004

Appl. No.:

10/960931

Inventors:

Christopher Margeson - Sunnyvale CA, US

International Classification:

G02B 7/182

US Classification:

359872000

Abstract:

A force actuator with clamp in one combined unit that can maintain a specified position without requiring a continuous power supply. Power is only required at times when the position of the shaft of the actuator needs to be changed. As each unit holds position without any external effort, a single controller can operate a plurality of these actuators. Clamping action is arranged coaxially to the force actuator, allowing for a more compact unit such that more of these units can be located in a small space to make fine adjustments.

US Patent:

20070273856, Nov 29, 2007

Filed:

May 24, 2007

Appl. No.:

11/802731

Inventors:

Christopher S. Margeson - Mountain View CA, US

Assignee:

NIKON CORPORATION - Tokyo

International Classification:

G03B 27/42

US Classification:

355 53, 355 30

Abstract:

A substrate stage is provided with an immersion liquid collection member that surrounds at least an alignment feature of the substrate stage used to align the substrate on the stage by engaging alignment structure of the substrate. The collection member is located at least partly below the periphery of the substrate held by the substrate holding member of the substrate stage. The collection member has an uppermost liquid-receiving surface that preferably is spaced below a lowermost surface of the substrate when the substrate is held by the substrate holding member. The collection member collects liquid that flows along the alignment feature so as to prevent that immersion liquid from flowing along the under-surface of the substrate.

US Patent:

20080024885, Jan 31, 2008

Filed:

Oct 1, 2007

Appl. No.:

11/865198

Inventors:

Christopher Margeson - Sunnyvale CA, US

International Classification:

G02B 7/02
B25B 5/16

US Classification:

359818000, 024481000

Abstract:

Forces are minimized in an object supported relative to a surface by providing a first, preferably static force sufficient to retain the object is position when at rest, preferably through a clamping arrangement having a first actuator, measuring or predicting an acceleration and applying a second, preferably dynamic force corresponding to the acceleration. The first and second forces are preferably arranged to be additive or reinforcing but the arrangement can be made fail-safe at the expense of increased power consumption by arranging the first force in accordance with the maximum anticipated acceleration and counteracting the first force with the second force for lesser or zero accelerations. The second force is preferably provided by a clamp of arbitrary configuration which can be moved into and out of engagement with the object. By minimizing forces applied to the object in such a manner, damage such as creep and propagation of crystal lattice dislocations over time can largely be prevented.