Roger E. Nelson - Sylmar CA Clyde L. Lucky - Sylmar CA
Assignee:
Sierracin Corporation - Sylmar CA
International Classification:
C23C 1400
US Classification:
204298
Abstract:
An optical transmission monitor for determining the optical transmissivity and thickness of films deposited on a substrate. A monitor substrate in the form of a rotating disk exposed to the deposition process is used. An optical system for measuring the transmissivity of the disk obstructs a fixed segment of the rotating disk so that the film thickness on the monitor disk is a known fraction of the film on the substrate being processed.
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