Cyril J Vancura
age ~46
from Palo Alto, CA
Cyril Vancura Phones & Addresses
- Palo Alto, CA
- Ithaca, NY
- Menlo Park, CA
Industries
Venture Capital & Private Equity
Us Patents
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Microelectromechanical Systems Encapsulation Process With Anti-Stiction Coating
view source -
US Patent:20080050861, Feb 28, 2008
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Filed:Aug 24, 2007
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Appl. No.:11/844844
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Inventors:Cyril Vancura - Palo Alto CA, US
Markus Ulm - Wannweil, DE
Brian Stark - Los Altos CA, US
Matthias Metz - Palo Alto CA, US
Tino Fuchs - Tubingen, DE
Franz Laermer - Weilder Stadt, DE
Silvia Kronmueller - Schwaikheim, DE -
International Classification:H01L 21/00
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US Classification:438127000, 257E21001
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Abstract:An encapsulated MEMS process including a high-temperature anti-stiction coating that is stable under processing steps at temperatures over 450 C. is described. The coating is applied after device release but before sealing vents in the encapsulation layer. Alternatively, an anti-stiction coating may be applied to released devices directly before encapsulation.
Resumes
Cyril Vancura
view sourceLocation:
San Francisco Bay Area
Industry:
Venture Capital & Private Equity
Classmates
Cyril Vancura
view sourceSchools:
Norton Community High School Norton KS 1944-1948
Community:
Dwight Slinkman, David Schneider, Bverly Butler, Glenn Dunavan, Delores Scarlett, Patricia Adams, Frank Horesky, Dorothy Kintigh, Esther Phillips, William Harper, Mary Wieland
Googleplus
Cyril Vancura
Education:
PhD - Physics
Youtube
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