Micron Technology
Global Thin Film Metrology Keg Engineer
Micron Technology May 2011 - Apr 2012
Cmp Npi Engineer Iii
Micron Technology Oct 1995 - Nov 2008
Equipment Engineer
Micron Technology Mar 2004 - Apr 2006
Shift Lead Production Engineer
Education:
Utah Valley University 1992 - 1995
Manchester High School
Skills:
Semiconductors Design For Manufacturing Manufacturing Process Integration Product Development Root Cause Analysis Dram R&D Process Simulation Semiconductor Industry Spc Semiconductor Process Ic Microelectronics Cvd Field Service Equipment Maintenance Design of Experiments Robotics Electrical Engineering Continuous Improvement Automation Testing Cmos Management Flash Memory Thin Films Product Engineering Lean Manufacturing Plasma Etch Engineering Management Failure Analysis Fmea Analog Etching Optics Silicon Photolithography Cross Functional Team Leadership Characterization Leadership Pvd Manufacturing Engineering Circuit Design Electro Mechanical Sensors Project Management Hardware Reliability Rf
Us Patents
Methods For Planarizing Workpieces, E.g., Microelectronic Workpieces
Carter Moore - Boise ID, US Elon Folkes - Boise ID, US Terry Castor - Boise ID, US
Assignee:
Micron Technology, Inc. - Boise ID
International Classification:
B24B 1/00 B24B 49/00 B24B 51/00
US Classification:
451 5, 438 5, 451 6, 451 8, 451 10, 451 41
Abstract:
This disclosure provides methods and apparatus for predictably changing the thickness of a microfeature workpiece. One implementation provides a planarizing method in which a first workpiece is planarized in first and second planarizing processes and a total change in thickness is determined. This thickness change is modified by a thickness offset associated with the second planarizing process and a material removal rate is calculated from this modified thickness change and the time on the first planarizer. A thickness of a second microfeature workpiece is measured and a target thickness of material to be removed is determined. A target planarizing time is then determined as a function of the target thickness reduction and the material removal rate.
Systems For Planarizing Workpieces, E.g., Microelectronic Workpieces
Carter Moore - Boise ID, US Elon Folkes - Boise ID, US Terry Castor - Boise ID, US
Assignee:
Micron Technology, Inc. - Boise ID
International Classification:
B24B 49/00 B24B 51/00
US Classification:
451 5, 438 5, 451 6, 451 8, 451 10
Abstract:
This disclosure provides methods and apparatus for predictably changing the thickness of a microfeature workpiece. One implementation provides a planarizing method in which a first workpiece is planarized in first and second planarizing processes and a total change in thickness is determined. This thickness change is modified by a thickness offset associated with the second planarizing process and a material removal rate is calculated from this modified thickness change and the time on the first planarizer. A thickness of a second microfeature workpiece is measured and a target thickness of material to be removed is determined. A target planarizing time is then determined as a function of the target thickness reduction and the material removal rate.
Methods And Systems For Planarizing Workpieces, E.g., Microelectronic Workpieces
Carter Moore - Boise ID, US Elon Folkes - Boise ID, US Terry Castor - Boise ID, US
International Classification:
B24B049/00
US Classification:
451005000
Abstract:
This disclosure provides methods and apparatus for predictably changing the thickness of a microfeature workpiece. One implementation provides a planarizing method in which a first workpiece is planarized in first and second planarizing processes and a total change in thickness is determined. This thickness change is modified by a thickness offset associated with the second planarizing process and a material removal rate is calculated from this modified thickness change and the time on the first planarizer. A thickness of a second microfeature workpiece is measured and a target thickness of material to be removed is determined. A target planarizing time is then determined as a function of the target thickness reduction and the material removal rate.