Eric G Liebscher

US Patent:

6882087, Apr 19, 2005

Filed:

Jul 8, 2004

Appl. No.:

10/886899

Inventors:

Mark J. Beck - Los Gatos CA, US
Richard B. Vennerbeck - Los Gatos CA, US
Raymond Y. Lillard - Redwood City CA, US
Eric G. Liebscher - San Jose CA, US

Assignee:

Product Systems Incorporated - Campbell CA

International Classification:

C25F005/00
H02N002/00
H01L041/08

US Classification:

310328, 310367, 134 13

Abstract:

A transducer comprising an acoustic energy generating means and a resonator. The acoustic energy generating means generates acoustic energy and is adapted for delivering an approximately uniform amount of acoustic energy to each unit of surface area on a substrate in a given time period when the substrate is rotating. The acoustic energy generating means has a surface area that is less than the surface area of the substrate, and may comprise a wedge shaped piezoelectric crystal. A resonator is attached to the acoustic energy generating means for transmitting the acoustic energy to the substrate.

US Patent:

6946774, Sep 20, 2005

Filed:

Sep 13, 2004

Appl. No.:

10/939792

Inventors:

Mark J. Beck - Los Gatos CA, US
Richard B. Vennerbeck - Los Gatos CA, US
Raymond Y. Lillard - Redwood City CA, US
Eric G. Liebscher - San Jose CA, US

Assignee:

Product Systems Incorporated - Campbell CA

International Classification:

H01L041/08
H02N002/00

US Classification:

310317, 310367, 134 13

Abstract:

A transducer comprising an acoustic energy generating means and a resonator. The acoustic energy generating means generates acoustic energy and is adapted for delivering an approximately uniform amount of acoustic energy to each unit of surface area on a substrate in a given time period when the substrate is rotating. The acoustic energy generating means has a surface area that is less than the surface area of the substrate, and may comprise two or more piezoelectric crystal segments that are separately controllable with respect to power and/or time. When assembled, the two more piezoelectric crystal segments give the acoustic energy generating means a rectangular shape, a wedge shape or a triangle shape. The resonator is attached to the acoustic energy generating means for transmitting the acoustic energy to the substrate.

US Patent:

7145286, Dec 5, 2006

Filed:

Sep 16, 2005

Appl. No.:

11/228600

Inventors:

Mark J. Beck - Los Gatos CA, US
Richard B. Vennerbeck - Los Gatos CA, US
Raymond Y. Lillard - Redwood City CA, US
Eric G. Liebscher - San Jose CA, US

Assignee:

Product Systems Incorporated - Campbell CA

International Classification:

H01L 41/08

US Classification:

310367, 134 13

Abstract:

A transducer comprising an acoustic energy generating means and a resonator. The acoustic energy generating means generates acoustic energy and is adapted for delivering an approximately uniform amount of acoustic energy to each unit of surface area on a substrate in a given time period when the substrate is rotating. The acoustic energy generating means has a surface area that is less than the surface area of the substrate, and may comprise two or more piezoelectric crystal segments that are separately controllable with respect to power and/or time. When assembled, the two more piezoelectric crystal segments give the acoustic energy generating means a rectangular shape, a wedge shape or a triangle shape. The resonator is attached to the acoustic energy generating means for transmitting the acoustic energy to the substrate.

US Patent:

7443079, Oct 28, 2008

Filed:

Sep 15, 2005

Appl. No.:

11/228855

Inventors:

Mark J. Beck - Los Gatos CA, US
Raymond Y. Lillard - Redwood City CA, US
Eric G. Liebscher - San Jose CA, US
Frank M. Haidinyak - San Jose CA, US

Assignee:

Product Systems Incorporated - Campbell CA

International Classification:

H01L 41/08
G01H 3/00
G01N 29/00

US Classification:

310328, 73590

Abstract:

An apparatus and method for characterizing cavitation that occurs in a fluid exposed to acoustic energy. The apparatus comprises a vessel for holding the fluid; an acoustic energy generating means for generating acoustic energy, the acoustic energy generating means being positioned to transmit the acoustic energy into the fluid while the fluid is held in the vessel; and a cavitation detection means for detecting cavitation in the fluid held in the vessel. In a preferred embodiment, the cavitation detection means comprises a light detection means, such as a photomultiplier tube, that detects sonoluminescent emission from the fluid. The method comprises the steps of exposing a volume of process fluid to acoustic energy at a specified power level; measuring the photon output from the fluid over a period of time; and when the photon output deviates from a desired level, initiating a remedial step to bring the photon output back to approximately the desired level.

US Patent:

7683525, Mar 23, 2010

Filed:

Oct 23, 2008

Appl. No.:

12/256782

Inventors:

Mark J. Beck - Los Gatos CA, US
Raymond Y. Lillard - Redwood City CA, US
Eric G. Liebscher - San Jose CA, US
Frank M. Haidinyak - San Jose CA, US

Assignee:

Product Systems Incorporated - Campbell CA

International Classification:

H01L 41/08
G01N 3/00
G01N 29/00

US Classification:

310328, 73590

Abstract:

A method for characterizing cavitation that occurs in a fluid exposed to acoustic energy. The method comprises the steps of exposing a volume of process fluid to acoustic energy at a specified power level; measuring the photon output from the fluid over a period of time; and when the photon output deviates from a desired level, initiating a remedial step to bring the photon output back to approximately the desired level.

US Patent:

20030168946, Sep 11, 2003

Filed:

Nov 1, 2002

Appl. No.:

10/286578

Inventors:

Mark Beck - Los Gatos CA, US
Richard Vennerbeck - Los Gatos CA, US
Raymond Lillard - Redwood City CA, US
Eric Liebscher - San Jose CA, US

Assignee:

Product systems Incorporated - Campbell CA

International Classification:

H01L041/08

US Classification:

310/367000

Abstract:

A transducer comprising an acoustic energy generating means and a resonator. The acoustic energy generating means generates acoustic energy in the frequency range of 0.4 to 2.0 MHz, and is adapted for delivering an approximately uniform amount of acoustic energy to each unit of surface area on a substrate in a given time period when the substrate is rotating. The acoustic energy generating means has a surface area that is less than the surface area of the substrate, and may comprise a wedge shaped piezoelectric crystal. A resonator is attached to the acoustic energy generating means for transmitting the acoustic energy to the substrate.

US Patent:

20130008462, Jan 10, 2013

Filed:

Jun 28, 2012

Appl. No.:

13/536944

Inventors:

Mark J. Beck - Los Gatos CA, US
Eric G. Liebscher - San Jose CA, US

Assignee:

PRODUCT SYSTEMS INCORPORATED - Campbell CA

International Classification:

B08B 6/00

US Classification:

134 13

Abstract:

A fluid manifold comprised of a manifold adapted to deliver fluid directly into a gap formed between a surface of a substrate and an acoustic transducer. The fluid is delivered into the gap at a variable rate along a length of the manifold. Preferably, the manifold includes a plurality of apertures positioned along the length of the manifold for dispensing the fluid into the gap at the variable rate.

US Patent:

20180021821, Jan 25, 2018

Filed:

Oct 2, 2017

Appl. No.:

15/723139

Inventors:

- Campbell CA, US
Eric G. Liebscher - San Jose CA, US

Assignee:

Product Systems Incorporated - Campbell CA

International Classification:

B08B 3/12
H01L 21/67

Abstract:

A fluid manifold comprised of a manifold adapted to deliver fluid directly into a gap formed between a surface of a substrate and an acoustic transducer. The fluid is delivered into the gap at a variable rate along a length of the manifold. Preferably, the manifold includes a plurality of apertures positioned along the length of the manifold for dispensing the fluid into the gap at the variable rate.