Eric B Westphal

Author:

Eric Westphal

ISBN #:

2869430272

US Patent:

20120092640, Apr 19, 2012

Filed:

Feb 24, 2010

Appl. No.:

13/260017

Inventors:

Richard John Johnson - Danbury CT, US
Frits Van Der Meulen - Eindhoven, NL
Eric Bernard Westphal - Monroe CT, US

Assignee:

ASML HOLDING N.V. - Veldhoven

International Classification:

G03B 27/58

US Classification:

355 72, 355 77

Abstract:

Provided is a method to load a patterning device () onto a reticle stage (RS) of a lithography system, a Rapid Exchange Device (RED) configured to load a patterning device () onto a reticle stage (RS) of a lithography system, and a system for manufacturing a semiconductor device lithographically. The method involves sharing compliance among six degree of freedom between the reticle stage (RS) and the RED. The RED complies in only a first three degrees of freedom and the reticle stage (RS) in only a second three degrees of freedom until the reticle stage (RS) and patterning device () are substantially in contact and coplanar.

US Patent:

59115920, Jun 15, 1999

Filed:

Jan 8, 1998

Appl. No.:

9/004417

Inventors:

Yaron Lew - New Haven CT
Eric B. Westphal - Norwalk CT

Assignee:

Framatome Connectors USA Inc. - Fairfield CT

International Classification:

H01R 424

US Classification:

439383

Abstract:

A printed circuit board assembly comprising a printed circuit board, a first connector, a second connector and a vibration damper. The first connector is mounted directly to the printed circuit board. The second connector is removably connected to the first connector. The vibration damper is located between the first and second connectors. The vibration damper comprises the second connector having a pair of stabilizers located on opposite sides of the first connector. The vibration damper also comprises a shim block that is removably attached to the first connector. The shim block is sandwiched between a first one of the pair of stabilizers and the first connector. This provides a friction connection between the first connector and the pair of stabilizers on the second connector.