Rodney Smedt - San Jose CA Ian Raphael - Campbell CA
Assignee:
Trigon/Adcotech - Milpitas CA
International Classification:
G01N 2186
US Classification:
250561
Abstract:
An improved optical inspection apparatus, especially suited for inspecting semiconductor devices using a single camera. A highly polished mirrored stage is provided with a light source extending upwardly therethrough and providing a pedestal upon which the object to be inspected is centered. A plurality of stationary reflectors are disposed around the stage and function in concert with two separate movable reflectors to provide optical scanning over the appropriate surface portions of the device. A separate movable reflector system is used to maintain a constant focal path length between the device and the camera as the other movable reflectors scan the device, thus ensuring proper focus and measurement accuracy.
Detector System Using Extremely Low Power To Sense The Presence Or Absence Of An Inert Or Hazardous Fuild
A fluid detection system capable of detecting the smallest amount of liquid chemicals, mixtures, aqueous solutions, pure water and others by detecting very low levels of resistance or conductance due to ionization when the liquid substances are subjected to very small amounts of electrical power in a small and localized sampling area. The system includes an electronic control module and a sensing probe. The control module provides strictly limited and controlled amounts of electrical voltage and current to one or more remotely located sensing probes which detect the level of resistance or conductance between two electrodes (gold pins) disposed at a fixed distance from one another. The voltage developed across the electrodes is input to a comparator circuit in the electronic module and compared to a reference to produce a signal defining either a dry or a wet (leak) condition of the sensing probe. This signal can be utilized to generate shutdown signals and/or audible and visual alarms. The detection system can also be used to very accurately detect fluid levels.
System And Method For Dispensing Liquid From Storage Containers
Bruce M. Juhola - Atherton CA Ian P. Raphael - Los Gatos CA
Assignee:
Microbar Systems, Inc. - Santa Clara CA
International Classification:
B67D 100 G01F 1100
US Classification:
222 1
Abstract:
A system for dispensing liquid from first and second containers is disclosed herein. The liquid dispensing system includes a first media transfer line, positioned in liquid-flow communication with the first container, for transferring liquid from the first container. A second media transfer line, positioned in liquid-flow communication with the second container, is disposed to transfer liquid from the second container. When placed in a first state a switchable valve prevents liquid from flowing through the first media transfer line and allows liquid to flow through the second media transfer line. In a second state the switchable valve prevents liquid from flowing through the second media transfer line while allowing liquid to flow through the first media transfer line. A liquid storage reservoir connected in liquid-flow communication with the switchable valve stores liquid received from the first and second media transfer lines by way of the switchable valve. A transfer line sensor arrangement monitors the first and second media transfer lines for the presence of liquid therein, and generates a first switching signal when liquid becomes absent from the first media transfer line and a second switching signal when liquid becomes absent from the second media transfer line.
David C. Bailey - San Jose CA Ian R. Raphael - Campbell CA
Assignee:
Cybor Corporation - San Jose CA
International Classification:
F04B 3910
US Classification:
417 53
Abstract:
A liquid pumping and filtering system for use in dispensing materials such as photoresist used to make semiconductors. A positive displacement diaphragm pump is used to draw source liquid from a source bottle. A pump valve is activated to direct fluid from the pump to a main dispensing line which includes a filter. A suckback line bridges the dispense line. The suckback line and the dispense line are each connected to a final dispense line, and the flow of liquid is controlled by a filter valve, which alternative causes fluid to flow through the suckback line or the dispense line, depending upon the mode of operation of the system. The use of an independent suckback line allows the quick withdrawal of fluid away from the dispense nozzle in the final dispense line. As a result, liquid in the dispensing line on opposite sides of the filter is generally maintained at constant pressure. Air bubbles trapped in the filter, which are generally unavoidable because of the construction thereof, are not allowed to expand and therefore do not distort measurements of liquid being dispensed.
System And Method For Dispensing Liquid From Storage Containers
A system for dispensing liquid from first and second containers is disclosed herein. The liquid dispensing system includes a first media transfer line, positioned in liquid-flow communication with the first container, for transferring liquid from the first container. A second media transfer line, positioned in liquid-flow communication with the second container, is disposed to transfer liquid from the second container. When placed in a first state a switchable valve prevents liquid from flowing through the first media transfer line and allows liquid to flow through the second media transfer line. In a second state the switchable valve prevents liquid from flowing through the second media transfer line while allowing liquid to flow through the first media transfer line. A liquid storage reservoir connected in liquid-flow communication with the switchable valve stores liquid received from the first and second media transfer lines by way of the switchable valve. A transfer line sensor arrangement monitors the first and second media transfer lines for the presence of liquid therein, and generates a first switching signal when liquid becomes absent from the first media transfer line and a second switching signal when liquid becomes absent from the second media transfer line.
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