Glenn C. Abeln - Orlando FL Robert Alan Ashton - Orlando FL Samir Chaudhry - Orlando FL Alan R. Massengale - Orlando FL Jinghui Ning - Orlando FL
Assignee:
Lucent Technologies Inc. - Murray Hill NJ
International Classification:
H01L21/8236
US Classification:
438276
Abstract:
A method for making an integrated circuit includes the steps of forming a plurality of spaced apart isolation regions in a substrate to define active regions therebetween, forming a first mask, and using the first mask for performing at least one implant in the active regions for defining high voltage active regions for the high voltage transistors. The method further includes the steps of removing the first mask and forming a second mask, and using the second mask for performing only one implant for converting at least one high voltage active region into a low voltage active region for a low voltage transistor. All of the implants needed to define the high voltage transistors are first performed throughout the active regions using the first mask. A separate single implant is then performed using the second mask to convert at least one of the high voltage active regions to a low voltage active region. A gate dielectric layer is formed on the high and low voltage active regions for corresponding high and low voltage transistors, and gates are formed on the gate dielectric layers.
QualComm since 2005
Senior Staff
Jazz semiconductor 2003 - 2005
Senior Staff
Texas Instruments 2001 - 2003
SPICE model specialist
Bell Labs Lucent Technologies Jan 1996 - Dec 2001
Memeber of technical Staff
Education:
University of Central Florida 1990 - 1995
PH.D, Electrical engineering with emphasis on micro-electronics