Jitendra R Bhimjiyani

US Patent:

20090139854, Jun 4, 2009

Filed:

Nov 30, 2007

Appl. No.:

11/948118

Inventors:

Yu Chang - San Jose CA, US
William Kuang - Sunnyvale CA, US
Ronald D. Dedore - Scotts Valley CA, US
Jitendra R. Bhimjiyani - Cupertino CA, US
Wesley W. Zhang - Sunnyvale CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

C23C 14/54
C23C 14/35

US Classification:

20419213, 20429803

Abstract:

A control system and method for controlling two motors determining the azimuthal and circumferential position of a magnetron rotating about the central axis of the sputter chamber in back of its target sputtering and capable of a nearly arbitrary scan path, e.g., with a planetary gear mechanism. A system controller periodically sends commands to the motion controller which closely controls the motors. Each command includes a command ticket, which may be one of several values. The motion controller accepts only commands having a command ticket of a different value from the immediately preceding command. One command selects a scan profile stored in the motion controller, which calculates motor signals from the selected profile. Another command instructs a dynamic homing command which interrogates sensors of the position of two rotating arms to determine if the arms in the expected positions. If not, the arms are rehomed.

US Patent:

20120103800, May 3, 2012

Filed:

Jan 10, 2012

Appl. No.:

13/347030

Inventors:

Yu Chang - San Jose CA, US
William Kuang - Sunnyvale CA, US
Ronald D. DeDore - Scotts Valley CA, US
Jitendra R. Bhimjiyani - Cupertino CA, US
Wesley W. Zhang - Sunnyvale CA, US

Assignee:

APPLIED MATERIALS, INC. - Santa Clara CA

International Classification:

C23C 14/35

US Classification:

20429803

Abstract:

A control system and method for controlling two motors determining the azimuthal and circumferential position of a magnetron rotating about the central axis of the sputter chamber in back of its target sputtering and capable of a nearly arbitrary scan path, e.g., with a planetary gear mechanism. A system controller periodically sends commands to the motion controller which closely controls the motors. Each command includes a command ticket, which may be one of several values. The motion controller accepts only commands having a command ticket of a different value from the immediately preceding command. One command selects a scan profile stored in the motion controller, which calculates motor signals from the selected profile. Another command instructs a dynamic homing command which interrogates sensors of the position of two rotating arms to determine if the arms in the expected positions. If not, the arms are rehomed.

US Patent:

20220262653, Aug 18, 2022

Filed:

Oct 28, 2021

Appl. No.:

17/513631

Inventors:

- Santa Clara CA, US
Coby Scott GROVE - Whitefish MT, US
Paul Zachary WIRTH - Kalispell MT, US
Avinash SHANTARAM - Whitefish MT, US
Alpay YILMAZ - San Jose CA, US
Amir NISSAN - Sunnyvale CA, US
Jitendra Ratilal BHIMJIYANI - Santa Clara CA, US
Niranjan PINGLE - Milpitas CA, US
Vincent Dicaprio - Sunnyvale CA, US

International Classification:

H01L 21/67
H01L 21/687
H01L 23/00

Abstract:

Methods and apparatus for bonding chiplets to substrates are provided herein. In some embodiments, a multi-chamber processing tool for processing substrates, includes: a first equipment front end module (EFEM) having one or more loadports for receiving one or more types of substrates, a second EFEM having one or more loadports; and a plurality of atmospheric modular mainframes (AMMs) coupled to each other and having a first AMM coupled to the first EFEM and a last AMM coupled to the second EFEM, wherein each of the plurality of AMMs include a transfer chamber and one or more process chambers coupled to the transfer chamber, wherein the transfer chamber includes a buffer, and wherein the transfer chamber includes a transfer robot, the one or more process chambers, and a buffer disposed in an adjacent AMM of the plurality of AMMs.