1) Theoretical propagation of light and ... • including attenuation and wavelength dis... • Fourier Transform theory • probability theory. 7) Broad knowledge o... • lenses • optical amplifiers • lasers • light emitting diodes • interferometers • spectrometers • detectors. 8) Design of electromagnetic ... • LabView
Languages
English • German
Interests
Kayaking • Children • Skiing • Experimental Design • Canoeing • Barbecueing • Economic Empowerment • See 1 • Hammer Throwing • See Less • Education • Hiking • Science and Technology • Dining Out • Health • Digital Photography • Ice Cream Making • Bayesian Probability Theory
Nanometrics
Staff Systems Engineer
Kla-Tencor Apr 1, 2015 - Nov 2017
Senior System Design Engineer: Lead Engineer
Kla-Tencor Sep 2014 - Apr 2015
Senior Product Development Engineer
Kla-Tencor Jul 2012 - Sep 2014
Product Development Engineer
National Institute of Standards and Technology May 2010 - May 2012
Nrc Arra Postdoc
Education:
University of Rochester 2003 - 2010
Doctorates, Doctor of Philosophy
Moravian College 1999 - 2003
Bachelors, Bachelor of Science, Physics
East Stroudsburg Senior High School 1999
Skills:
Optics Physics Photonics Matlab Thin Films Spectroscopy Labview Characterization Nanotechnology Semiconductors Simulations Latex Fluorescence Microscopy Lithography Biomedical Engineering Optical Engineering R&D Sensors Confocal Microscopy Metrology Research Testing Design of Experiments Science Product Development Failure Analysis Signal Processing Uv Lithography Experimentation Image Processing Laser Microscopy Engineering Photolithography Laser Physics Semiconductor Industry Systems Engineering Algorithms Spc Ellipsometry Jmp Numerical Analysis Programming Fluorescence Spectroscopy Fret Fluorescence Scanning Electron Microscopy Tem Optical Microscopy
Interests:
Kayaking Children Skiing Experimental Design Canoeing Barbecueing Economic Empowerment See 1 Hammer Throwing See Less Education Hiking Science and Technology Dining Out Health Digital Photography Ice Cream Making Bayesian Probability Theory
University of Rochester Rochester, NY Jan 2003 to Jan 2010 Doctor of Philosophy in Optical PhysicsMoravian College Bethlehem, PA Sep 1999 to May 2003 BS in Physics
Skills:
1) Theoretical propagation of light and electromagnetic radiation through free space and matter. 2) Theoretical modeling of the coupling of free space electromagnetic radiation to dipole antennas. 3) Modeling the emission patterns and reception patterns of dipole antennas and dipole antenna arrays. 4) Modeling guided electromagnetic wave propagation in optical fibers, including attenuation and wavelength dispersion. 5) Modeling and experimental expertise with the interaction of polarized light and matter. 6) Math: Differential equations, Fourier Transform theory, probability theory. 7) Broad knowledge of optical components and devices: mirrors, lenses, optical amplifiers, lasers, light emitting diodes, interferometers, spectrometers, detectors. 8) Design of electromagnetic imaging and detection systems. 9) Optical lock-in detection of intensity modulated signals or polarization modulated signals. 10) Rigorous calibration of scientific instruments. 11) Image enhancement through deconvolution. 12) Programming: MATLAB, LabView
- WILMINGTON MA, US John F. Lesoine - San Jose CA, US
International Classification:
G01N 21/21 G02B 7/28 G01J 3/02
Abstract:
An ellipsometer includes a focusing system that uses an image of the measurement spot to determine a best focal position for the ellipsometer. The focus signal is produced by splitting off the ellipsometer measurement spot before the signal is analyzed by a polarizer thereby avoiding imagining the spot with a modulated intensity. The focus signal is imaged on a sensor array and based on the position of the spot on the sensor array, the focal position of the ellipsometer may be determined. A single image may be used to determine the focal position of the ellipsometer permitting a real time focus position measurement.
Bandgap Measurements Of Patterned Film Stacks Using Spectroscopic Metrology
- Milpitas CA, US Aaron Rosenberg - Milpitas CA, US Dawei Hu - Milpitas CA, US Alexander Kuznetsov - Milpitas CA, US Manh Dang Nguyen - Milpitas CA, US Stilian Pandev - Santa Clara CA, US John Lesoine - Milpitas CA, US Qiang Zhao - Milpitas CA, US Liequan Lee - Fremont CA, US Houssam Chouaib - San Jose CA, US Ming Di - Hayward CA, US Torsten R. Kaack - Los Altos CA, US Andrei V. Shchegrov - Campbell CA, US Zhengquan Tan - Milpitas CA, US
International Classification:
G01J 3/18 G01J 3/28
Abstract:
A spectroscopic metrology system includes a spectroscopic metrology tool and a controller. The controller generates a model of a multilayer grating including two or more layers, the model including geometric parameters indicative of a geometry of a test layer of the multilayer grating and dispersion parameters indicative of a dispersion of the test layer. The controller further receives a spectroscopic signal of a fabricated multilayer grating corresponding to the modeled multilayer grating from the spectroscopic metrology tool. The controller further determines values of the one or more parameters of the modeled multilayer grating providing a simulated spectroscopic signal corresponding to the measured spectroscopic signal within a selected tolerance. The controller further predicts a bandgap of the test layer of the fabricated multilayer grating based on the determined values of the one or more parameters of the test layer of the fabricated structure.
- Milpitas CA, US John Lesoine - San Jose CA, US Malik Sadiq - Walnut Creek CA, US Lanhua Wei - Fremont CA, US Shankar Krishnan - Santa Clara CA, US Leonid Poslavsky - Belmont CA, US Mikhail M. Sushchik - Pleasanton CA, US
International Classification:
G01N 21/21 G01N 21/95 G01N 21/27
Abstract:
Methods and systems for matching measurement spectra across one or more optical metrology systems are presented. The values of one or more system parameters used to determine the spectral response of a specimen to a measurement performed by a target metrology system are optimized. The system parameter values are optimized such that differences between measurement spectra generated by a reference system and the target system are minimized for measurements of the same metrology targets. Methods and systems for matching spectral errors across one or more optical metrology systems are also presented. A trusted metrology system measures the value of at least one specimen parameter to minimize model errors introduced by differing measurement conditions present at the time of measurement by the reference and target metrology systems. Methods and systems for parameter optimization based on low-order response surfaces are presented to reduce the compute time required to refine system calibration parameters.
- Milpitas CA, US John Lesoine - San Jose CA, US Malik Sadiq - Walnut Creek CA, US Lanhua Wei - Fremont CA, US Shankar Krishnan - Santa Clara CA, US Leonid Poslavsky - Belmont CA, US Mikhail M. Sushchik - Castro Valley CA, US
International Classification:
G01N 21/21 G01N 21/95
US Classification:
356369
Abstract:
Methods and systems for matching measurement spectra across one or more optical metrology systems are presented. The values of one or more system parameters used to determine the spectral response of a specimen to a measurement performed by a target metrology system are optimized. The system parameter values are optimized such that differences between measurement spectra generated by a reference system and the target system are minimized for measurements of the same metrology targets. Methods and systems for matching spectral errors across one or more optical metrology systems are also presented. A trusted metrology system measures the value of at least one specimen parameter to minimize model errors introduced by differing measurement conditions present at the time of measurement by the reference and target metrology systems. Methods and systems for parameter optimization based on low-order response surfaces are presented to reduce the compute time required to refine system calibration parameters.