John A Lilleland

US Patent:

6376385, Apr 23, 2002

Filed:

Feb 23, 2001

Appl. No.:

09/790715

Inventors:

John Lilleland - San Jose CA
Jerome S. Hubacek - Fremont CA
William S. Kennedy - Redwood Shores CA

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

H01L 21302

US Classification:

438710, 156345, 118723 E

Abstract:

An electrode assembly for a plasma reaction chamber wherein processing of a semiconductor substrate such as a single wafer can be carried out, a method of manufacture of the electrode assembly and a method of processing a semiconductor substrate with the assembly. The electrode assembly includes a support member such as a graphite ring, an electrode such as a silicon showerhead electrode in the form of a circular disk of uniform thickness and an elastomeric joint between the support member and the electrode. The elastomeric joint allows movement between the support member and the electrode to compensate for thermal expansion as a result of temperature cycling of the electrode assembly. The elastomeric joint can include an electrically and/or thermally conductive filler and the elastomer can be a catalyst-cured polymer which is stable at high temperatures.

US Patent:

61487651, Nov 21, 2000

Filed:

Sep 9, 1999

Appl. No.:

9/392265

Inventors:

John Lilleland - San Jose CA
Jerome S. Hubacek - Fremont CA
William S. Kennedy - Redwood Shores CA

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

C23C 1600

US Classification:

118723E

Abstract:

An electrode assembly for a plasma reaction chamber wherein processing of a semiconductor substrate such as a single wafer can be carried out, a method of manufacture of the electrode assembly and a method of processing a semiconductor substrate with the assembly. The electrode assembly includes a support member such as a graphite ring, an electrode such as a silicon showerhead electrode in the form of a circuit disk of uniform thickness and an elastomeric joint between the support member and the electrode. The elastomeric joint allows movement between the support member and the electrode to compensate for thermal expansion as a result of temperature cycling of the electrode assembly. The elastomeric joint can include an electrically and/or thermally conductive filler and the elastomer can be a catalyst-cured polymer which is stable at high temperatures.

US Patent:

61943223, Feb 27, 2001

Filed:

Jul 31, 2000

Appl. No.:

9/629457

Inventors:

John Lilleland - San Jose CA
Jerome S. Hubacek - Fremont CA
William S. Kennedy - Redwood Shores CA

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

H01L 21302

US Classification:

438710

Abstract:

An electrode assembly for a plasma reaction chamber wherein processing of a semiconductor substrate such as a single wafer can be carried out, a method of manufacture of the electrode assembly and a method of processing a semiconductor substrate with the assembly. The electrode assembly includes a support member such as a graphite ring, an electrode such as a silicon showerhead electrode in the form of a circular disk of uniform thickness and an elastomeric joint between the support member and the electrode. The elastomeric joint allows movement between the support member and the electrode to compensate for thermal expansion as a result of temperature cycling of the electrode assembly. The elastomeric joint can include an electrically and/or thermally conductive filler and the elastomer can be a catalyst-cured polymer which is stable at high temperatures.

US Patent:

60735775, Jun 13, 2000

Filed:

Jun 30, 1998

Appl. No.:

9/107471

Inventors:

John Lilleland - San Jose CA
Jerome S. Hubacek - Fremont CA
William S. Kennedy - Redwood Shores CA

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

H01L 2100

US Classification:

118723E

Abstract:

An electrode assembly for a plasma reaction chamber wherein processing of a semiconductor substrate such as a single wafer can be carried out, a method of manufacture of the electrode assembly and a method of processing a semiconductor substrate with the assembly. The electrode assembly includes a support member such as a graphite ring, an electrode such as a silicon showerhead electrode in the form of a circular disk of uniform thickness and an elastomeric joint between the support member and the electrode. The elastomeric joint allows movement between the support member and the electrode to compensate for thermal expansion as a result of temperature cycling of the electrode assembly. The elastomeric joint can include an electrically and/or thermally conductive filler and the elastomer can be a catalyst-cured polymer which is stable at high temperatures.

US Patent:

20220214225, Jul 7, 2022

Filed:

Mar 22, 2022

Appl. No.:

17/700582

Inventors:

- St. Louis MO, US
John LILLELAND - Morgan Hill CA, US

Assignee:

Watlow Electric Manufacturing Company - St. Louis MO

International Classification:

G01K 7/02
G01K 1/16
G01K 1/143
G01K 1/08
G01K 1/14

Abstract:

The present disclosure is directed toward a temperature detector probe that includes a housing, a pair of electrical connectors, a support cap, and a sensor. The housing defines a bore longitudinally extending through the housing, and the pair of electrical connectors extend through the bore. The support cap is disposed at a first end portion of the housing. The sensor is provided on the support cap and is electrically coupled to the pair of electrical connectors. The support cap is positioned between the pair of electrical connectors and the support cap.

US Patent:

20230059671, Feb 23, 2023

Filed:

Sep 28, 2022

Appl. No.:

17/954448

Inventors:

- ST. LOUIS MO, US
Ethan DINAUER - St. Louis MO, US
Sanhong ZHANG - Ballwin MO, US
Scott H. BOEHMER - Hannibal MO, US
Scott YARBROUGH - St. Louis MO, US
Troy Ruben BOLTON - St. Louis MO, US
John LILLELAND - Morgan Hill CA, US
Jacob WILSON - St. Charles MO, US
Mike BANGE - Elsberry MO, US
Mark D. EVERLY - St. Charles MO, US

Assignee:

WATLOW ELECTRIC MANUFACTURING COMPANY - ST. LOUIS MO

International Classification:

F28F 9/22
F28F 9/013
F28D 7/16
F28D 7/06

Abstract:

A heater includes a flow guide and a plurality of electrical resistance heating elements. The flow guide defines a continuous geometric helicoid disposed about a longitudinal axis of the heater assembly. The flow guide defines a predetermined pattern of perforations that extend in a longitudinal direction through a first longitudinal length of the geometric helicoid, the longitudinal direction being parallel to the longitudinal axis. The plurality of electrical resistance heating elements extend through the perforations. At least one electrical resistance heating element of the plurality of electrical resistance heating elements has a first region with a first watt density and a second region with a second watt density. The second region is located farther in the longitudinal direction than the first region. The second watt density is less than the first watt density.

US Patent:

20200400530, Dec 24, 2020

Filed:

Jun 22, 2020

Appl. No.:

16/907976

Inventors:

- St. Louis MO, US
Fatemeh NOSRATI - San Jose CA, US
Jacob LINDLEY - St. Louis MO, US
John LILLELAND - Morgan Hill CA, US
Sanhong ZHANG - Ballwin MO, US

Assignee:

Watlow Electric Manufacturing Company - St. Louis MO

International Classification:

G01M 7/02
G05B 19/042
G05B 19/4097
H01L 21/67

Abstract:

A method of monitoring a condition of a dynamic system includes installing a vibration signal acquisition device at a predetermined location of the dynamic system, acquiring vibration signals by the vibration signal acquisition device, analyzing the vibration signals in a frequency domain, and predicting a change in the condition of the dynamic system based on the vibration signals in the frequency domain. A system is also provided, and a condition of the dynamic system includes clogging.

US Patent:

20190293495, Sep 26, 2019

Filed:

Mar 21, 2019

Appl. No.:

16/360669

Inventors:

- St. Louis MO, US
John LILLELAND - Morgan Hill CA, US

Assignee:

Watlow Electric Manufacturing Company - St. Louis MO

International Classification:

G01K 7/02
G01K 1/14
G01K 1/16

Abstract:

The present disclosure is directed toward a temperature detector probe that includes a housing, a pair of electrical connectors, a support cap, and a sensor. The housing defines a bore longitudinally extending through the housing, and the pair of electrical connectors extend through the bore. The support cap is disposed at a first end portion of the housing. The sensor is provided on the support cap and is electrically coupled to the pair of electrical connectors. The support cap is positioned between the pair of electrical connectors and the support cap.