John C Simmermon

US Patent:

56168276, Apr 1, 1997

Filed:

Jun 15, 1995

Appl. No.:

8/490640

Inventors:

John C. Simmermon - Newark DE
Curtis G. Dell - North Star DE
Douglas Peterson - Newark DE
Colin B. Blakemore - Hockessin DE
John B. Remaley - Marcus Hook PA
Anatoly Golod - Wilmington DE
Robert S. Bear - Newark DE

Assignee:

Ametek, Inc. - Newark DE

International Classification:

G01N 700

US Classification:

73 2901

Abstract:

A flow manifold for high purity analyzers is described, in which all flow control valving is positioned downstream of the measurement device. Specifically, this new flow manifold is applied to a high purity moisture analyzer that utilizes a quartz crystal microbalance detector. The proposed flow design eliminates outgassing and contamination from upstream valving, deadlegs in the flow path, and significantly improves instrument response speed. Experimental data is provided to confirm the performance advantage of the new manifold design over existing designs.