John C Stover

Author:

John Stover

ISBN #:

0226776581

Author:

John Stover

ISBN #:

0226776565

Author:

John Stover

ISBN #:

0226776573

Author:

John Stover

ISBN #:

0595221211

Author:

John F. Stover

ISBN #:

0231040466

Author:

John F. Stover

ISBN #:

0415921341

Author:

John F. Stover

ISBN #:

0415921406

Author:

John C. Stover

ISBN #:

0070618143

US Patent:

6760100, Jul 6, 2004

Filed:

Mar 12, 2001

Appl. No.:

09/804218

Inventors:

Vladimir I. Ivakhnenko - Norwood MA
John C. Stover - North Attleboro MA

Assignee:

ADE Corporation - Westwood MA

International Classification:

G01N 2100

US Classification:

3562372, 3562373, 3563274

Abstract:

In an optical inspection system, defects such as particles, pits, subsurface voids, mounds, or other defects occurring at or near the smooth surface of a substrate are classified by type and size based on the magnitude S of a signal produced by collected light for each of a plurality N of different test configurations, yielding a plurality of signal magnitudes S through S. A database is consulted, comprising a relationship of S versus defect size d for each test configuration and for each of a plurality of idealized defect types, so as to determine a defect size d corresponding to each measured signal magnitude S, and an average defect size is determined for each defect type. Signal magnitudes S through S that would be produced by a defect of the average size are determined for each defect type, and defect type is determined based on a smallest deviation between the measured magnitudes and the determined magnitudes.

US Patent:

6833028, Dec 21, 2004

Filed:

Feb 11, 2002

Appl. No.:

10/074354

Inventors:

Craig A. Scheer - North Attleboro MA
John C. Stover - North Attleboro MA

Assignee:

The Scatter Works Inc. - Tucson AZ

International Classification:

B05C 1500

US Classification:

118309, 118308, 118302, 118693

Abstract:

In a method for depositing particles onto a substrate a flow of gas containing particles is provided along a flow path that bypasses a deposition chamber. The flow path may direct the flow of the gas containing the particles to a vacuum. To deposit particles onto a substrate in the deposition chamber, the flow path of the gas containing the particles is diverted into the deposition chamber so that particles are deposited onto the substrate. After a desired amount of particles have been deposited onto the substrate, the flow path of the flow of the gas containing the particles is changed to the flow path that bypasses the deposition chamber. A particle deposition system and a method for maintaining particle diameter during deposition of particles onto a substrate also are described.

US Patent:

20050118332, Jun 2, 2005

Filed:

Nov 17, 2004

Appl. No.:

10/992560

Inventors:

Craig Scheer - North Attleboro MA, US
John Stover - North Attleboro MA, US

International Classification:

B05D001/12

US Classification:

427180000

Abstract:

In a method for depositing particles onto a substrate a flow of gas containing particles is provided along a flow path that bypasses a deposition chamber. The flow path may direct the flow of the gas containing the particles to a vacuum. To deposit particles onto a substrate in the deposition chamber, the flow path of the gas containing the particles is diverted into the deposition chamber so that particles are deposited onto the substrate. After a desired amount of particles have been deposited onto the substrate, the flow path of the flow of the gas containing the particles is changed to the flow path that bypasses the deposition chamber. A particle deposition system and a method for maintaining particle diameter during deposition of particles onto a substrate also are described.

US Patent:

20130258323, Oct 3, 2013

Filed:

Dec 23, 2012

Appl. No.:

13/726154

Inventors:

William P. Kuhn - Tucson AZ, US
John C. Stover - Tucson AZ, US
Robert S. LeCompte - Tucson AZ, US

International Classification:

G01B 11/26

US Classification:

356138

Abstract:

A device and method for subaperture stray light detection and diagnosis in an optical system. A test light beam is generated with a width whose cross sectional area is less than the cross sectional area of a system aperture. Stray light is detected at a system detection surface. Based on the stray light and the location and direction angles of the light beam, potential paths that light may have taken to arrive at the detection surface are determined so as to identify physical features of the optical system that may have produced the stray light. A testing device comprises a test light beam source, preferably including a beam width magnifier, whereby the cross sectional area of the test light beam is made less than the cross sectional area of the system aperture. A relative lateral positioning stage and an angular beam directing stage launch the test light beam into the aperture at a selected position and selected directional angles. A detector and a data processing system produce a data set relating the stray light to the location and directional angles of the test light beam. A light trap and complementary test light beam delivery system are also provided.

US Patent:

51969068, Mar 23, 1993

Filed:

Jun 29, 1990

Appl. No.:

7/547468

Inventors:

John C. Stover - Bozeman MT
James A. Bender - Bozeman MT
Marvin L. Bernt - Bozeman MT
Donald R. Bjork - Bozeman MT
Paul D. Chausse - Bozeman MT
Daniel R. Cheever - Bozeman MT
Kelly H. Kirchner - Bozeman MT
Tod F. Schiff - Bozeman MT
Vincent C. Skurdal - Bozeman MT

Assignee:

TMA Technologies, Inc. - Bozeman MT

International Classification:

G01N 2147

US Classification:

356446

Abstract:

An optical measurement device produces quality light scatter measurements using Bidirectional Reflective Distribution Function (BRDF) techniques to analyze data generated from an accurate, portable, relatively inexpensive scatterometer. The scatterometer is provided with interchangeable scanning heads, each scanning head being equipped with ROM data storage containing certain configuration information about the scanning head. The use of the interchangeable scanning heads allows the present invention to make measurements of light scatter for a wide variety of applications and samples under a variety of environmental conditions where scatter measurement has previously not been feasible.

US Patent:

54165903, May 16, 1995

Filed:

Apr 19, 1993

Appl. No.:

8/049478

Inventors:

John C. Stover - Bozeman MT
Donald R. Bjork - Bozeman MT
Donald A. Rudberg - Bozeman MT
Mark E. Southwood - Bozeman MT
Brett D. Swimley - Bozeman MT

Assignee:

TMA Technologies, Inc. - Bozeman MT

International Classification:

G01B 1114

US Classification:

356375

Abstract:

A hand-held apparatus and process for measuring the gap and mismatch of two adjacent surfaces. The apparatus includes two strobe lights positioned within a hand-held housing. An optical interface within the housing directs a portion of the light generated by each light source into substantially parallel planes which are projected out of the opening of the housing at converging angles onto the surfaces to be measured. A camera within the housing captures the resulting image and generates a signal corresponding to the image. A signal processor which includes a frame grabber card processes the signal generated by the array of detectors to thereby calculate the amount of gap and mismatch between the surfaces being measured.

US Patent:

54060826, Apr 11, 1995

Filed:

Nov 27, 1992

Appl. No.:

7/982293

Inventors:

Lee H. Pearson - Bear River City UT
John Stover - Bozeman MT
Mary Knighton - Bozeman MT
Brett Swimley - Bozeman MT

Assignee:

Thiokol Corporation - Ogden UT

International Classification:

G01N 2135
G01N 2147

US Classification:

25033901

Abstract:

A system and process for obtaining near real time, non-destructive inspection and characterization of surfaces. The system includes an infrared light source which is directed on a surface to be inspected. A portion of the reflected light is gathered and directed through an optical filter arrangement which separates the light into a plurality of sets of wavelengths which correspond to particular physical properties of the thin film, such as absorbance. The intensity of each set of wavelengths is detected by optical detectors and the resulting signals analyzed to characterize the surface.

US Patent:

20140362377, Dec 11, 2014

Filed:

May 30, 2014

Appl. No.:

14/291281

Inventors:

- Tucson AZ, US
John Clyde Stover - Tucson AZ, US

Assignee:

ScatterMaster LLC - Tucson AZ

International Classification:

G01N 21/47
G01N 21/49

US Classification:

356343, 356446

Abstract:

A hemispherical scanning optical scatterometer and method for its use for measuring scattered radiation, with a reflected scatter measurement laser, and/or a transmitted scatter measurement laser, an array of optical detectors, a computer controlled system to rotate the array of optical detectors, an electronic system, a computer interface and a computer for processing the signal.