Barry M. Singer - New York NY Joseph J. Lalak - Briarcliff Manor NY
Assignee:
North American Philips Corporation - New York NY
International Classification:
C23F 102
US Classification:
156626
Abstract:
A method of reducing the thickness of a wafer of fragile material, e. g. pyroelectric material, by placing the wafer, supported only at its rim, in a holder filled with a non-corrosive liquid. The holder with the exposed surface of wafer is placed in an etch bath to reduce the thickness of the wafer. The wafer is removed from the etch bath, without removing it from the holder, to measure its thickness, using its index of refraction, which is facilitated by the presence of a bubble in the non-corrosive liquid.
Method Of Manufacturing A Pyroelectric Vidicon Target, Apparatus For Practicing The Method, And A Pyroelectric Target Manufactured By The Method
Edward H. Stupp - Spring Valley NY Joseph Lalak - Briarcliff Manor NY
Assignee:
North American Philips Corporation - New York NY
International Classification:
C23F 104
US Classification:
156654
Abstract:
A method of manufacturing a target from a pyroelectric material exhibiting ferroelectric domains includes the steps of poling the target in a uniform direction and then etching a central region of the target to produce a thin target with a thick support rim around an outer edge. An apparatus for poling wafers of pyroelectric material includes two electrodes spaced a fixed distance apart by an electrode separator. The pyroelectric material is mounted in the separator at a fixed position between the electrodes. An electrically insulating liquid dielectric fills the spaces between the electrodes and the pyroelectric material in order to maximize the electric field across the material. A pyroelectric target produced by poling prior to etching exhibits reduced surface anomolies and improved image quality.