J. Gary Eden - Mahomet IL, US Kuo-Feng Chen - Urbana IL, US Nels P. Ostrom - Champaign IL, US Sung-Jin Park - Champaign IL, US
Assignee:
The Board of Trustees of the University of Illinois - Urbana IL
International Classification:
H01J 17/49
US Classification:
313582
Abstract:
A method for fabricating microcavity discharge devices and arrays of devices. The devices are fabricated by layering a dielectric on a first conducting layer. A second conducting layer or structure is overlaid on the dielectric layer. In some devices, a microcavity is created that penetrates the second conducting layer or structure and the dielectric layer. In other devices, the microcavity penetrates to the first conducting layer. The second conducting layer or structure together with the inside face of the microcavity is overlaid with a second dielectric layer. The microcavities are then filled with a discharge gas. When a time-varying potential of the appropriate magnitude is applied between the conductors, a microplasma discharge is generated in the microcavity. These devices can exhibit extended lifetimes since the conductors are encapsulated, shielding the conductors from degradation due to exposure to the plasma. Some of the devices are flexible and the dielectric can be chosen to act as a mirror.
Silicon Single Crystal Doped With Gallium, Indium, Or Aluminum
John P. DeLuca - Chesterfield MO, US Bayard K. Johnson - Jefferson Hills PA, US William L. Luter - St. Charles MO, US Neil D. Middendorf - St. Louis MO, US Dick S. Williams - St. Charles MO, US Nels Patrick Ostrom - Worden IL, US James N. Highfill - St. Paul MO, US
International Classification:
H01B 1/04 B65D 85/84 C30B 15/04
US Classification:
252512, 117 21, 2065241
Abstract:
A doped silicon single crystal having a resistivity variation along a longitudinal and/or radial axis of less than 10% and a method of preparing one or a sequential series of doped silicon crystals is disclosed. The method includes providing a melt material comprising silicon into a continuous Czochralski crystal growth apparatus, delivering a dopant, such as gallium, indium, or aluminum, to the melt material, providing a seed crystal into the melt material when the melt material is in molten form, and growing a doped silicon single crystal by withdrawing the seed crystal from the melt material. Additional melt material is provided to the apparatus during the growing step. A doping model for calculating the amount of dopant to be delivered into the melt material during one or more doping events, methods for delivering the dopant, and vessels and containers used to deliver the dopant are also disclosed.
GT Advanced Technologies - Hazelwood, MO since Aug 2011
HiCz® Marketing/Materials Sales Manager
Confluence Solar Nov 2009 - Sep 2011
Product Marketing and Applications Manager
Coherent Apr 2007 - Sep 2009
Engineering Manager
Nuvonyx, Inc. 2005 - 2007
Process Engineer
University of Illinois Oct 2004 - Jan 2005
Post-Doctoral Research Associate
Education:
Southern Illinois University, Edwardsville 2009 - 2010
Master, Business Administration
University of Illinois at Urbana-Champaign 2000 - 2004
Doctor of Philosophy, Electrical Engineering
University of Illinois at Urbana-Champaign 1998 - 2000
Master of Science, Electrical Engineering
University of Illinois at Urbana-Champaign 1994 - 1998
Bachelor of Science, Electrical Engineering
Skills:
Manufacturing Product Development Engineering Management R&D Engineering Six Sigma Lean Manufacturing Semiconductors Electronics Testing Spc Product Management Process Engineering Optics Design of Experiments Materials Photovoltaics Manufacturing Engineering Solar Energy Failure Analysis Project Management Characterization Silicon Automation Product Marketing Laser Thin Films Sensors Materials Science Process Simulation 5S Semiconductor Industry Renewable Energy New Business Development Metrology Simulations Product Lifecycle Management Electrical Engineering Business Development Global Business Development
GT Advanced Technologies Mesa, AZ Jun 2014 to Nov 2014 Materials Characterization and Laboratory ManagerGT Advanced Technologies Salem, MA Feb 2013 to Nov 2014 Product ManagerGT Advanced Technologies
Nov 2009 to Mar 2013 Product Marketing, Applications & Materials Sales ManagerCoherent, Inc Hazelwood, MO Apr 2007 to Sep 2009 Engineering Manager/Senior Manufacturing EngineerCoherent, Inc Hazelwood, MO Feb 2005 to Apr 2007 Process Engineer/Laser ScientistUniversity of Illinois
Aug 2000 to Jan 2005 Graduate Research Assistant/Post-Doctoral Research AssociateUniversity of Illinois Urbana, IL Aug 2001 to Dec 2002 Graduate Teaching Assistant
Education:
Southern Illinois University at Edwardsville Dec 2010 MBA in international business developmentUniversity of Illinois at Urbana Urbana-Champaign, IL Oct 2004 Ph.D. in Electrical EngineeringUniversity of Illinois at Urbana Urbana-Champaign, IL Aug 2000 M.S. in Electrical EngineeringUniversity of Illinois at Urbana Urbana-Champaign, IL Dec 1998 B.S. in Electrical Engineering
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