Nicholas J Economou

US Patent:

20110049364, Mar 3, 2011

Filed:

Feb 13, 2009

Appl. No.:

12/919676

Inventors:

Rainer Knippelmeyer - Winchester MA, US
Nicholas Economou - Lexington MA, US
Mohan Ananth - Boxborough MA, US
Lewis A. Stern - Hollis NH, US
Bill DiNatale - Bedford MA, US
Lawrence Scipioni - Bedford MA, US

Assignee:

Carl Zeiss SMT Inc. - Peabody MA

International Classification:

G01N 23/225

US Classification:

250307

Abstract:

Methods disclosed herein include: (a) forming a channel in a sample, the channel extending one micron or more along a direction oriented at an angle to a surface of the sample; (b) exposing a portion of the sample above the channel to a particle beam to cause particles to leave the surface of the sample; and (c) forming an image of the sample based on particles that leave the surface.

US Patent:

49437321, Jul 24, 1990

Filed:

Aug 16, 1989

Appl. No.:

7/394674

Inventors:

Nicholas P. Economou - Lexington MA

Assignee:

Micrion Corporation - Peabody MA

International Classification:

G01N 2188

US Classification:

250572

Abstract:

Methods and apparatus for locating defects in liquid crystal display (LCD) panels include scanning the panel with a laser, detecting reflected, refracted, scattered or transmitted light, and processing signals representative of the detected light utilizing a digital processor, to detect discontinuities in the arrays of LCD elements on the panel.

US Patent:

51031027, Apr 7, 1992

Filed:

Feb 24, 1989

Appl. No.:

7/315732

Inventors:

Nicholas P. Economou - Lexington MA
David Edwards - Hamilton MA
Nicholas Guarino - Arlington MA

Assignee:

Micrion Corporation - Peabody MA

International Classification:

H01J 3718
H01J 3302

US Classification:

2504922

Abstract:

An apparatus for generating a localized, non-contact vacuum seal at a selected process region of a workpiece surface includes a vacuum body with a workpiece-facing surface having a plurality of concentric grooves and a central bore thorugh which a process energy beam can be transmitted. A method of generating a localized vacuum seal includes placing the vacuum body into selected proximity with the process region of the workpiece surface, and differentially evacuating the grooves, thereby defining differentially pumped vacuum chambers which reduce the influx of atmospheric particles to the process region. A selected control gas can be introduced into a vacuum body groove to further reduce the influx of atmospheric particles to the process region, and selected process gases can be introduced into the vacuum body to react with the process beam.

Author:

Nicholas Economou

ISBN #:

0868405450