Disclosed are masks and mask blanks for photolithographic processes, photosensitive films and fabrication method therefor. Photosensitive films are deposited on a substrate in the masks for recording permanent pattern features via UV exposure. The masks are advantageously phase-shifting, but can be gray-scale masks having index patterns with arbitrary distribution of refractive index and pattern depth. The masks may have features above the surface formed from opaque or attenuating materials. Boro-germano-silicate photosensitive films having a composition consisting essentially, in terms of mole percentage, of: 0-20% of BO, 5-25% of GeOand the remainder SiOcan be used for the film. The film is advantageously deposited by using PECVD wherein tetramethoxygermane is used as the germanium source.
Mask, Mask Blank, Photosensitive Material Therefor And Fabrication Thereof
Robert Bellman - Painted Post NY, US Nicholas Borrelli - Elmira NY, US George Hares - Corning NY, US Charlene Smith - Corning NY, US Robin Walton - Painted Post NY, US
Disclosed are masks and mask blanks for photolithographic processes, photosensitive materials and fabrication method therefor. Photosensitive materials are used in the masks for recording permanent pattern features via UV exposure. The masks are advantageously phase-shifting, but can be gray-scale masks having index patterns with arbitrary distribution of refractive index and pattern dimension. The masks may have features above the surface formed from opaque or attenuating materials. Alumino-boro-germano-silicate glasses having a composition comprising, in terms of mole percentage, 1-6% of AlO, 10-36% of BO, 2-20% of GeO, 40-80% of SiO, 2-10% of RO, where R is selected from Li, Na and K, and expressed in terms of weight percentage of the glass, 0-5% of F, can be used for the mask substrate.
David Francis Dawson-Elli - Elmira NY, US Kishor Purushottam Gadkaree - Big Flats NY, US Robin Merchant Walton - Painted Post NY, US
International Classification:
H01L 31/00
US Classification:
136256
Abstract:
Systems and methods of production of a photovoltaic device include creating on a donor semiconductor wafer an exfoliation layer and transferring the exfoliation layer to an insulator substrate. One or more finishing processes may be performed before and/or after transferring the exfoliation layer, such as to create a plurality of photovoltaic structure layers. Production of the photovoltaic device further may include subjecting the donor semiconductor wafer to an ion implantation process to create the exfoliation layer, bonding the exfoliation layer to the insulator substrate, and separating the exfoliation layer from the donor semiconductor wafer. Transferring may include forming an anodic bond via electrolysis, such as through the application of heat, pressure and voltage to the exfoliation layer and the insulator structure.
Kishor Purushottam Gadkaree - Big Flats NY, US David Francis Dawson-Elli - Elmira NY, US Robin Merchant Walton - Painted Post NY, US
International Classification:
H01L 31/00
US Classification:
136256
Abstract:
Photovoltaic devices include an insulator structure bonded to an exfoliation layer, preferably of a substantially single-crystal donor semiconductor wafer, and at least one photovoltaic device layer, such as a conductive layer. In a preferred embodiment, a device may include a conductive layer adjacent to the insulator substrate and integral to the exfoliation layer, near the side that faces the insulator substrate, such as between the insulator substrate and the exfoliation layer. In a further preferred embodiment, a device may include a plurality of photovoltaic device layers distal to the insulator substrate and in or on the exfoliation layer, preferably having been epitaxially grown on the exfoliation layer after the exfoliation layer has been anodically bonded to the insulator substrate by means of electrolysis.
- Corning NY, US Thomas Michael Cleary - Elmira NY, US Philippe Engel - Vaux le Penil, FR Robin Merchant Walton - Redwood City CA, US Jue Wang - Pittsford NY, US
A vehicle includes a body of the vehicle and a sensing system coupled to the body. The sensing system includes optical componentry and a glass material, where the glass material at least in part houses the optical componentry and the glass material is at least partially transparent to light at the wavelength of the optical componentry. Further the glass material has mechanical and performance properties that allow the sensing system to be positioned particularly low on the vehicle, at a position that may be of higher risk for damage from debris.
- CORNING NY, US Thomas Michael Cleary - Elmira NY, US Philippe Engel - Vaux le Penil, FR Robin Merchant Walton - Redwood City CA, US Jue Wang - Fairport NY, US
International Classification:
B60R 21/01 G02B 1/02 G02B 1/14 G01D 11/24
Abstract:
A vehicle includes a body of the vehicle and a sensing system coupled to the body. The sensing system includes optical componentry and a glass material, where the glass material at least in part houses the optical componentry and the glass material is at least partially transparent to light at the wavelength of the optical componentry. Further the glass material has mechanical and performance properties that allow the sensing system to be positioned particularly low on the vehicle, at a position that may be of higher risk for damage from debris.
Enhanced, Durable Silver Coating Stacks For Highly Reflective Mirrors
- Corning NY, US Frederick J. Gagliardi - Jaffrey NH, US Gary Allen Hart - Walworth NY, US Timothy R. Soucy - Brattleboro VT, US Robin Merchant Walton - Redwood City CA, US Leonard Gerard Wamboldt - Sunderland MA, US Jue Wang - Fairport NY, US
International Classification:
G02B 5/08 G02B 1/14
Abstract:
The disclosure is directed to a highly reflective multiband mirror that is reflective in the VIS-NIR-SWIR-MWIR-LWIR bands, the mirror being a complete thin film stack that consists of a plurality of layers on a selected substrate. In order from substrate to the final layer, the mirror consists of (a) substrate, (b) barrier layer, (c) first interface layer, (d) a reflective layer, (e) a second interface layer, (f) tuning layer(s) and (g) a protective layer. In some embodiments the tuning layer and the protective layer are combined into a single layer using a single coating material. The multiband mirror is more durable than existing mirrors on light weight metal substrates, for example 6061-Al, designed for similar applications. In each of the five layer types methods and materials are used to process each layer so as to achieve the desired layer characteristics, which aid to enhancing the durability performance of the stack.
Enhanced, Durable Silver Coating Stacks For Highly Reflective Mirrors
- Corning NY, US Frederick J Gagliardi - Jeffrey NH, US Gary Allen Hart - Walworth NY, US Timothy R Soucy - Brattleboro VT, US Robin Merchant Walton - Redwood City CA, US Leonard Gerard Wamboldt - Sunderland MA, US Jue Wang - Fairport NY, US
International Classification:
G02B 5/08 G02B 1/14
Abstract:
The disclosure is directed to a highly reflective multiband mirror that is reflective in the VIS-NIR-SWIR-MWIR-LWIR bands, the mirror being a complete thin film stack that consists of a plurality of layers on a selected substrate. In order from substrate to the final layer, the mirror consists of (a) substrate, (b) barrier layer, (c) first interface layer, (d) a reflective layer, (e) a second interface layer, (f) tuning layer(s) and (g) a protective layer. In some embodiments the tuning layer and the protective layer are combined into a single layer using a single coating material. The multiband mirror is more durable than existing mirrors on light weight metal substrates, for example 6061-Al, designed for similar applications. In each of the five layer types methods and materials are used to process each layer so as to achieve the desired layer characteristics, which aid to enhancing the durability performance of the stack.
East Greenbrier Junior High School Ronceverte WV 1993-1997
Community:
Angela Clutter, Martina Cole, Cory Bowyer, Michael Osborne, Khara Saunders, Steve Withrow, Teresa Riffle, Lee Waid, Laura Delatorre, Katrina Scott, Angela Letts