Sezhian Annamalai

US Patent:

20130047669, Feb 28, 2013

Filed:

Aug 1, 2012

Appl. No.:

13/563882

Inventors:

Sezhian Annamalai - Painted Post NY, US

International Classification:

C03B 19/06

US Classification:

65 176

Abstract:

In one aspect the disclosure is directed to a binary silica-titania glass blank having a CTE of 030 ppb/ C. or less over a temperature range of 5 C. to 35 C., and a doped silica-titania glass critical zone, wherein the dopant(s) are selected from the group consisting of aluminum oxide, and transition metal oxides, and amount of the dopant(s) is in the range of 0.05 wt. % to 8 wt. %. In various embodiments the dopants are selected from the group consisting of 0.25 wt. % to 8 wt. % AlO, 0.05 wt. % to 3 wt. % NbO, and 0.25 wt. % to 6 wt. % TaO, and mixtures thereof.

US Patent:

20130052391, Feb 28, 2013

Filed:

Aug 1, 2012

Appl. No.:

13/564215

Inventors:

Sezhian Annamalai - Painted Post NY, US

International Classification:

B32B 17/00

US Classification:

428 67

Abstract:

In one aspect the disclosure is directed to a binary silica-titania blank having a CTE of 030 ppb/ C. or less and a insert made of silica-titania-dopant(s) glass in the critical zone, wherein the dopants are selected from the group consisting of aluminum oxide, selected transition metal oxides, and amount of the dopants is in the range of 0.05 wt. % to 8 wt. % and the insert is fusion bonded to the blank with or without a frit. In various embodiments the dopants are selected from the group consisting of 0.25 wt. % to 8 wt. % AlO, 0.05 wt. % to 3 wt. % NbO, and 0.25 wt. % to 6 wt. % TaO.

US Patent:

20100083996, Apr 8, 2010

Filed:

Jun 12, 2009

Appl. No.:

12/457517

Inventors:

Biprodas Dutta - Silver Spring MD, US
Ian L. Pegg - Alexandria VA, US
Sezhian Annamalai - Silver Spring MD, US
Rudra P. Bhatta - Fairfax VA, US

International Classification:

H01L 35/00
C03C 14/00

US Classification:

136200, 65442

Abstract:

A method of drawing a glass clad wire is provided herein, the method comprising: (i) sealing off one end of a glass tube such that the tube has an open end and a closed end; (ii) introducing a wire material inside the glass tube; (iii) heating a portion of the glass tube such that the glass partially melts to form a first ampoule containing the wire material to be used in a drawing operation; (iv) introducing the first ampoule containing the wire material into a heating device; (v) increasing the temperature within the heating device such that the glass tube is heated enough for it to be drawn and wire material melts; and (vi) drawing the glass clad wire comprising a continuous wire of wire material, wherein the wire material is a metal, semi-metal, alloy, or semiconductor thermoelectrically active material, and wherein the wire diameter is equal to or smaller than about 5 μm.

US Patent:

20180105452, Apr 19, 2018

Filed:

Mar 22, 2016

Appl. No.:

15/559958

Inventors:

- Corning NY, US
Sezhian Annamalai - Painted Post NY, US

International Classification:

C03C 10/00
C03C 3/06
C03C 3/076
G03F 1/60
B32B 17/06
C03B 19/06
C03B 23/203
C03B 32/02

Abstract:

A glass composite for use in Extreme Ultra-Violet Lithography (EUVL) is provided. The glass composite includes a first silica-titania glass section. The glass composite further includes a second doped silica-titania glass section mechanically bonded to a surface of the first silica-titania glass section, wherein the second doped silica-titania glass section has a thickness of greater than about 1.0 inch.

US Patent:

20150218039, Aug 6, 2015

Filed:

Jan 26, 2015

Appl. No.:

14/604998

Inventors:

- Corning NY, US
Sezhian Annamalai - Painted Post NY, US
Carlos Alberto Duran - Ottawa, CA
John Edward Maxon - Canton NY, US

International Classification:

C03C 3/076
C03B 19/09
C03C 3/06

Abstract:

A glass article for use in Extreme Ultra-Violet Lithography (EUVL) is provided. The glass article includes a silica-titania glass having a compositional gradient through the glass article, the compositional gradient being defined by the functions:wherein [TiO] is the concentration of titania in wt. %, [SiO] is the concentration of silica in wt. %, c is the titania concentration in wt. % for a predetermined zero crossover temperature (T), f(x, y, z) is a function in three-dimensional space that defines the difference in average composition of a volume element centered at the coordinates (x, y, z) with respect to c, and δ(x, y, z) is a function in three-dimensional space that defines the sum of all other components of a volume element centered at the coordinates (x, y, z).