Thomas Edgar Haw

US Patent:

8254767, Aug 28, 2012

Filed:

Aug 26, 2009

Appl. No.:

12/547605

Inventors:

Aaron M. Hunter - Santa Cruz CA, US
Jiping Li - Palo Alto CA, US
Rajesh S. Ramanujam - Cupertino CA, US
Thomas Haw - Portland OR, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

A21B 2/00

US Classification:

392416, 392407, 392418

Abstract:

Embodiments of the invention are directed to methods and apparatus for rapid thermal processing of a substrate over an extended temperature range, including low temperatures. Systems and methods for using an extended temperature pyrometry system employing a transmitted radiation detector system are disclosed. Systems combining transmitted radiation detector systems and emitted radiation detector systems are also described.

US Patent:

8506161, Aug 13, 2013

Filed:

Jun 21, 2011

Appl. No.:

13/165021

Inventors:

Thomas Haw - Portland OR, US

Assignee:

Advanced Energy Industries, Inc. - Fort Collins CO

International Classification:

G01J 5/00

US Classification:

374121, 374120, 374179, 374130, 374132

Abstract:

This disclosure describes systems, methods, and apparatuses for making a non-contact measurement of a substrate in a plasma processing chamber that accounts for stray blackbody radiation. In particular, a photocurrent is calculated that can be attributed to the stray blackbody radiation based upon a temperature of the stray blackbody radiation, a reflectance of a target substrate, and a temperature of the substrate. Knowing the photocurrent attributable to the stray blackbody radiation, a non-contact temperature measurement can be made, and the photocurrent attributable to the stray blackbody radiation can be subtracted out to arrive at a more accurate non-contact substrate temperature measurement.

US Patent:

20130245996, Sep 19, 2013

Filed:

Mar 19, 2012

Appl. No.:

13/424262

Inventors:

Thomas Haw - Portland OR, US
Gary Kercheck - Portland OR, US

Assignee:

ADVANCED ENERGY INDUSTRIES, INC. - Fort Collins CO

International Classification:

G06F 15/00

US Classification:

702166

Abstract:

This disclosure describes systems, methods, and apparatus for remotely monitoring an elevation, or change in elevation, of a fluid surface, such as that of molten sapphire. The remote monitoring can be performed by measuring positions of a pair of reflected laser beams off the fluid surface as detected on an imaging sensor. As the surface elevation falls, the positions of the pair of reflected laser beams move relative to each other, and this positional change can be converted into a change in the fluid surface elevation.

US Patent:

20130264316, Oct 10, 2013

Filed:

Mar 8, 2013

Appl. No.:

13/789982

Inventors:

Jiping Li - Palo Alto CA, US
Aaron Muir Hunter - Santa Cruz CA, US
Thomas Haw - Portland OR, US

International Classification:

B23K 26/00
G01J 5/02
G01N 21/59

US Classification:

2191216, 356432, 374121

Abstract:

Apparatus and methods for measuring the temperature of a substrate are disclosed. The apparatus includes a source of temperature-indicating radiation, a detector for the temperature-indicating radiation, and a decorrelator disposed in an optical path between the source of temperature-indicating radiation and the detector for the temperature-indicating radiation. The decorrelator may be a broadband amplifier and/or a mode scrambler. A broadband amplifier may be a broadband laser, Bragg grating, a fiber Bragg grating, a Raman amplifier, a Brillouin amplifier, or combinations thereof. The decorrelator is selected to emit radiation that is transmitted, at least in part, by the substrate being monitored. The source is matched to the decorrelator such that the emission spectrum of the source is within the gain bandwidth of the decorrelator, if the decorrelator is a gain-driven device.

US Patent:

56713142, Sep 23, 1997

Filed:

Jan 15, 1993

Appl. No.:

8/002865

Inventors:

Kenton W. Gregory - West Linn OR
Thomas E. Haw - Portland OR

Assignee:

Sisters of Prividence in Oregon - Portland OR

International Classification:

G02B 622

US Classification:

385128

Abstract:

Illumination devices (20, 20', 20", 20'") for delivering ultraviolet light to an in vivo treatment site comprise an optical fiber (22) having an illumination window (40, 40', 40", 40'"). A circumferential contour (46, 46', 46", 46'") of the core is shaped along the illumination window so that, for an internally reflected ray travelling in the core, the internally reflected ray has differing angles of incidences along the illumination window. In addition, the contour of the circumferential core causes rays travelling parallel to a major axis of the optical fiber to strike the core-scattering layer interface, thereby resulting in greater irradiance. In one embodiment, in the illumination window (40') a circumferential contour (46') of the core is shaped by etching to have an essentially semi-conical shape. In another embodiment, in the illumination window (40") the circumferential contour of the core has a plurality of circumferential segments (46a", 46b", 46c"), one of which has an essentially semi-conical shape and another of which has a reduced radius annular shape. In another embodiment, a reflective surface (60) is formed at a distal end of the optical fiber.

US Patent:

52541150, Oct 19, 1993

Filed:

Oct 11, 1991

Appl. No.:

7/775171

Inventors:

Krishna M. Bhatta - Brookline MA
Thomas E. Haw - Portland OR

Assignee:

The General Hospital Corporation - Boston MA

International Classification:

A61B 1732

US Classification:

606 16

Abstract:

A coagulating scalpel including a cutting and coagulating element and a dissecting element. The dissecting element and cutting and coagulating element is positioned and configured and of such size that tissue to be cut can pass over or along a surface of the dissecting element and into the cutting zone of the scalpel. The surface of the dissecting element is adapted to permit substantially free passage of the tissue over or along the surface of the dissecting element upon movement of the scalpel.

US Patent:

20190375045, Dec 12, 2019

Filed:

Aug 26, 2019

Appl. No.:

16/550563

Inventors:

- Santa Clara CA, US
Aaron Muir HUNTER - Santa Cruz CA, US
Thomas HAW - Arcadia CA, US

International Classification:

B23K 26/00
G01J 5/02
G01N 21/59

Abstract:

Apparatus and methods for measuring the temperature of a substrate are disclosed. The apparatus includes a source of temperature-indicating radiation, a detector for the temperature-indicating radiation, and a decorrelator disposed in an optical path between the source of temperature-indicating radiation and the detector for the temperature-indicating radiation. The decorrelator may be a broadband amplifier and/or a mode scrambler. A broadband amplifier may be a broadband laser, Bragg grating, a fiber Bragg grating, a Raman amplifier, a Brillouin amplifier, or combinations thereof. The decorrelator is selected to emit radiation that is transmitted, at least in part, by the substrate being monitored. The source is matched to the decorrelator such that the emission spectrum of the source is within the gain bandwidth of the decorrelator, if the decorrelator is a gain-driven device.