John A Korbler

US Patent:

7784478, Aug 31, 2010

Filed:

Jan 22, 2007

Appl. No.:

11/625556

Inventors:

Pejman Fani - San Diego CA, US
Mark Rouillard - Mission Viejo CA, US
John Korbler - Mertztown PA, US
James Brown - Jim Thorpe PA, US
Chad Hosack - Tigard OR, US

International Classification:

B08B 3/12

US Classification:

134174, 134 13, 134 951, 134 952, 134 953, 134137

Abstract:

A system, apparatus and method for processing flat articles, such as semiconductor wafers, with acoustical energy. In a cleaning process, the inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively. In one aspect, the invention is a system for processing flat articles comprising: a first dispenser for applying a liquid to a first surface of a flat article; a second dispenser for applying liquid to a second surface of a flat article; a first transducer assembly positioned so as to transmit acoustical energy to the first surface of the flat article; and a second transducer assembly positioned so as to transmit acoustical energy to the second surface of the flat article.

US Patent:

7836769, Nov 23, 2010

Filed:

Aug 10, 2007

Appl. No.:

11/837292

Inventors:

John Korbler - Mertztown PA, US

International Classification:

G01H 1/00
H01L 41/00

US Classification:

73645, 73 148, 73649, 310313

Abstract:

An apparatus and method for measuring the acoustical energy that will be applied to a substrate during cleaning. A substrate is provided that has placed upon it a piezoelectric member that is capable of sensing the acoustical power that is transmitted. This enables the detection and calibration of transducer assemblies that are used in the cleaning of substrates.

US Patent:

8279712, Oct 2, 2012

Filed:

Nov 6, 2008

Appl. No.:

12/266543

Inventors:

John A. Korbler - Mertztown PA, US
Richard Novak - Plymouth MN, US

International Classification:

H04R 17/00

US Classification:

367155

Abstract:

A transducer, system and method of constructing the same that utilizes a composite of piezoelectric pillars. In one embodiment, the invention is an apparatus for generating acoustic energy comprising: a plurality of pillars constructed of a piezoelectric material, the pillars arranged in a spaced-apart manner so that spaces exist between adjacent pillars; the pillars having a width and a height extending between a top surface and a bottom surface, wherein the height of the pillars is greater than the width of the pillars; and the spaces filled with a resilient material so as to form a composite assembly.

US Patent:

8316869, Nov 27, 2012

Filed:

Aug 30, 2010

Appl. No.:

12/871286

Inventors:

Pejman Fani - San Diego CA, US
Mark Rouillard - Mission Viejo CA, US
John Korbler - Mertztown PA, US
James Brown - Jim Thorpe PA, US
Chad Hosack - Tigard OR, US

International Classification:

B08B 3/00

US Classification:

134153, 134137, 134157, 134902

Abstract:

A system, apparatus and method for processing flat articles with acoustical energy. The inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively. In one aspect, the invention is a system and/or method for processing flat articles wherein a liquid is applied to both major surfaces of the flat article. A first transducer assembly is positioned adjacent to a first of the major surfaces of the flat article and a second member is positioned adjacent to a second of the major surfaces. The first transducer assembly generates and transmits acoustical energy to the first major surface of the flat article while the second member either: (1) reflects the acoustical energy generated by the first transducer assembly back to the second major surface of the flat article; and/or (2) generates and transmits acoustical energy to the second major surface of the flat article.

US Patent:

20040149308, Aug 5, 2004

Filed:

Oct 31, 2003

Appl. No.:

10/699042

Inventors:

John Korbler - Mertztown PA, US
Xuecang Geng - State College PA, US

International Classification:

B08B003/10

US Classification:

134/001300, 134/025400, 134/184000, 134/186000, 134/902000

Abstract:

A system and method for improving the efficiency and effectiveness of the transmission of acoustical energy to process fluids during substrate processing, such as cleaning or photoresist stripping. The invention utilizes a layered stack of materials to transmit acoustical energy from a source of acoustical energy to the process fluid. The material of which each layer is constructed is chosen so as to reduce the differences in acoustical impedance between consecutive layers of the stack, providing a more gradual transition, in terms of acoustical impedance, when acoustical energy is being transmitted from the source to the process fluid. In one aspect, the invention is a system comprising: a process chamber for receiving a process fluid; an acoustical energy source; and an acoustical stack having a first transmission layer and a second transmission layer that forms an acoustical energy pathway from the acoustical energy source to the process fluid in the process chamber.

US Patent:

20060054182, Mar 16, 2006

Filed:

Sep 15, 2005

Appl. No.:

11/227705

Inventors:

John Korbler - Mertztown PA, US
Ismail Kashkoush - Orefield PA, US
John Volkert - New Tripoli PA, US
Michael Peters - Tucson AZ, US
Pejman Fani - San Diego CA, US

International Classification:

B08B 3/12

US Classification:

134001000

Abstract:

A system and method of supplying power to a sonic energy source that minimizes damage to substrate devices during processing while increasing processing efficiency and/or effectiveness. The system and method utilize the concept of ramping the amplitude and/or varying the frequency of the electrical signal used to drive the sonic energy source, thereby resulting in corresponding ramping and/or variations in the amplitude and frequency of the resulting sonic energy being applied to the substrate. A method of processing a substrate with sonic energy comprising: a) supporting at least one substrate in a process chamber; b) generating a base electrical signal; c) transmitting the base electrical signal to an amplifier, the amplifier converting the base electrical signal into an output electrical signal having a peak amplitude; d) transmitting the output electrical signal to a transducer, the transducer converting the output electrical signal into corresponding sonic energy; e) applying the sonic energy to the at least on substrate supported in the process chamber; and f) ramping the peak amplitude of the output electrical signal.

US Patent:

20060260638, Nov 23, 2006

Filed:

Mar 8, 2006

Appl. No.:

11/370361

Inventors:

Pejman Fani - San Diego CA, US
Ismail Kashkoush - Orefield PA, US
John Korbler - Mertztown PA, US
Vivek Vohra - Upper Macungie PA, US
Alan Walter - Chester Springs PA, US

International Classification:

B08B 3/12
B08B 7/00

US Classification:

134001000, 134033000

Abstract:

A system and method for processing and/or cleaning substrates using sonic energy that eliminates or reduces damage to the substrates. In one aspect, the invention utilizes and produces low power density sonic energy to effectively remove particles from a substrate. In another aspect, the invention utilizes and generates a clean electrical signal for driving a source of sonic energy, such as a transducer.

US Patent:

20060260639, Nov 23, 2006

Filed:

Mar 8, 2006

Appl. No.:

11/370707

Inventors:

Pejman Fani - San Diego CA, US
Ismail Kashkoush - Orefield PA, US
John Korbler - Mertztown PA, US
Vivek Vohra - Upper Macungie PA, US
Alan Walter - Chester Springs PA, US

International Classification:

B08B 3/12
B08B 7/00

US Classification:

134001000, 134033000, 134184000

Abstract:

A system and method for processing and/or cleaning substrates using sonic energy that eliminates or reduces damage to the substrates. In one aspect, the invention utilizes and produces low power density sonic energy to effectively remove particles from a substrate. In another aspect, the invention utilizes and generates a clean electrical signal for driving a source of sonic energy, such as a transducer.